A PDMS-based thermo-pneumatic micropump with Parylene inner walls

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 1894-1897

  Yang, Lung Jieh ^a,b   Lin, Tzu Yuan ^a  

^a TAMKANG UNIVERSITY   (Taiwan)

^b NATIONAL APPLIED RESEARCH LABORATORIES   (Taiwan)

Author keywords

Parylene inner wall; PDMS based; Thermo pneumatic micropump; Valve less

Indexed keywords

ACTUATION STROKES; DIFFUSER/NOZZLE; EVAPORATION CHAMBERS; GAS LEAKAGES; GLASS SLIDES; INFRARED IMAGERS; INNER WALLS; MICRO PUMP; PARYLENES; PDMS-BASED; PHASE CHANGE; RECTIFICATION EFFECTS; SQUARE WAVES; THREE-LAYER; VALVE-LESS; WALL TEMPERATURES; WORKING LIQUID;

FLOW RATE; HEATING; MICROCHANNELS; PNEUMATICS;

PUMPS;

EID: 79960041368     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.02.067     Document Type: Conference Paper

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