Design, fabrication, and testing of a hybrid CMOS/PDMS microsystem for cell culture and incubation

IEEE Transactions on Biomedical Circuits and Systems

Volumn 1, Issue 1, 2007, Pages 3-18

  Christen, Jennifer Blain ^a   Andreou, Andreas G ^b  

^a JOHNS HOPKINS UNIVERSITY SCHOOL OF MEDICINE   (United States)

^b Johns Hopkins University   (United States)

Author keywords

3 D microsystems; Cell culture; CMOS; Micro incubator; Microfluidic; Poly(dimethylsiloxane) (PDMS)

Indexed keywords

CELL CULTURE; CLOSED LOOP CONTROL SYSTEMS; CMOS INTEGRATED CIRCUITS; FLAT CABLES; MICROFLUIDICS; POLYDIMETHYLSILOXANE; POLYIMIDES; TEMPERATURE SENSORS;

HYBRID MICROSYSTEM; MICRO-INCUBATOR;

MICROSYSTEMS;

EID: 34247855843     PISSN: 19324545     EISSN: None     Source Type: Journal    
DOI: 10.1109/TBCAS.2007.893189     Document Type: Article

References (42)

1. J. Davis, Ed., Basic Cell Culture: A Practical Approach, ser. A Practical Approach. New York: Oxford Univ. Press, 1994.
2. Y. Xia and G. Whitesides, "Soft lithography," Angewandte Chem. Inte. Ed., vol. 37, no. 5, pp. 550-575, Dec. 1998.
3. S. Quake and A. Scherer, "From micro to nanofabrication with soft materials," Science, vol. 290, no. 5496, pp. 1536-1539, Nov. 2000.
4. Fluidigm Corp. South San Francisco, CA, (2003) [Online]. Available: http://www.fluidigm.com/
5. Lab on a Chip, Royal Society of Chemistry. Cambridge, U.K. 2001.
6. A. Folch, B. Jo, O. Hurtado, D. Beebe, and M. Toner, "Microfabricated elastomeric stencils for micropatterning cell cultures," J. Biomed. Mater. Res., vol. 52, no. 2, pp. 346-353, 2000.
7. W. Gu, X. Zhu, N. Futai, B. Cho, and S. Takayama, "Computerized microfluidic cell culture using elastomeric channels and Braille displays," in Proc. Nat. Acad. Sc., 2004, vol. 10, no. 45, pp. 15861-15866.
8. E. Leclerc, Y. Sakai, and T. Fujii, "Cell culture in 3-dimensional microfluidic structures of PDMS (polydimethylsiloxane)," Biomed. Microdev., vol. 5, no. 2, pp. 109-114, 2003.
9. P. Hung, P. Lee, P. Sabounchi, N. Aghdam, R. Lin, and L. Lee, "A novel high aspect ratio microfluidic design to provide a stable and uniform microenvironment for cell growth in a high throughput mammalian cell culture array," Lab on a Chip, vol. 5, no. 44-48, pp. 44-48, 2005.
10. N. Cohen, "The development of spontaneous beating activity in cultured heart cells: From cells to networks," Ph.D. dissertation, Israel Inst. Technol., Haifa, Israel, Dec. 2000.
11. Applied Scientific Instrumentation. (2006) [Online]. Available: http:// www.asiimaging.com.
12. A. Tourovskaia, X. Figueroa-Masot, and A. Folch, "Differentiation-on-a-chip: A microfluidic platform for long-term culture studies," Lab on a Chip, vol. 5, pp. 14-19, 2005.
13. A. Lambacher, M. Jenkner, M. Merz, B. Eversmann, R. Kaul, F. Hofmann, R. Thewes, and P. Fromherz, "Electrical imaging of neuronal activity by multitransistor-array (MTA) recording at 7.8 mm resolution," Appl. Phys. A, vol. 79, pp. 1607-1611, 2004.
14. M. Shin, K. Matsuda, O. Ishii, H. Terai, M. Kaazemput-Mofrad, J. Borenstein, M. Detmar, and J. Vacanti, "Endothelialized networks with vascular geometry in microfabricated poly(dimethylsiloxane)," Biomed. Microdev., vol. 6, no. 4, pp. 269-278, 2004.
15. B. Debusschere and G. Kovacs, "Portable cell-based biosensor system using integrated CMOS cell-cartridges," Biosens. Bioelectron., vol. 16, pp. 543-556, 2001.
16. T. Wescott, "PID Without a Ph.D." (2000) [Online]. Available: http://www.embedded.com
17. J. Charais, "Software PID control of an inverted pendulum using the PIC16F684," Microchip Technology Inc., Chandler, AZ, Appl. Notes 00964A, Oct. 2004.
18. W. Zhou and W.-S. Hu, "On-line characterization of a hybridoma cell culture process," Biotechnol. Bioeng., vol. 44, no. 2, pp. 170-177, Jun. 1994.
19. S. Charati and S. Stern, "Difusion of gases in silicone polymers: Molecular dynamics simulations," Macromolecules, vol. 31, pp. 5529-5535, 1998.
20. G. Walker, H. Zeringue, and D. Beebe, "Microenvironment design considerations for cellular scale studies," Lab on a Chip, vol. 4, pp. 91-97, 2004.
21. J. B. Christen and A. Andreou, "Hybrid silicon/silicone (polydimethylsiloxane) microsystem for cell culture," in Proc. IEEE Int. Symp. Circuits Syst., May 2006, pp. 2490-2493.
22. COMSOL, Inc. Burlington, MA [Online]. Available: http://www.comsol.com/
23. PageWorks, Cambridge, MA., (2001) [Online]. Available: http:// www.pageworks.com
24. Omega Engineering, Inc. Stamford, CT, 2006.
25. Small Parts, Inc., Miami Lakes, FL, (2006) [Online]. Available: http:// www.smallparts.com
26. J. Blain Christen and A. Andreou, "CMOS heater array for incubation environment cellular study," in Proc. 48th Midw. Symp. Circuits Syst., Aug. 2005, pp. 1786-1789.
27. E. Williams, R. Ayres, and M. Heller, "The 1.7 kilogram microchip: Energy and material use in the production of semiconductor devices," Environ. Sci. Technol., vol. 36, no. 24, pp. 5504-5510, Oct. 2002.
28. M. Hutzler and P. Fromherz, "Silicon chip with capacitors and transistors for interfacing organotypic brain slice of rat hippocampus," Eur. J. Neurosci., vol. 19, pp. 2231-2238, 2004.
29. Y. Liu, E. Smela, N. Nelson, and P. Abshire, "Cell-lab on a chip: A CMOS-based microsystem for culturing and monitoring cells," in Proc. 26th Annu. Int. Conf. Eng. Med. Biol. Soc. 2004,, Sep. 2004, pp. 2534-2537.
30. MOSIS, Marina Del Key, CA, (2006) [Online]. Available: http:// www.mosis.org
31. I. W. Chan, K. B. Brown, R. P. Lawson, A. M. Robinson, Y. Ma, and D. Strembicke, "Gas phase pulse etching of silicon for MEMS with xenon difluoride," in Proc. 1999 IEEE Can. Conf. Elect. Comp. Eng., May 1999, pp. 1637-1642.
32. J. B. Christen, C. Davis, M. Li, and A. Andreou, "Design, double sided post-processing, and packaging of CMOS compatible Bio-MEMS device arrays," in Proc. IEEE Int. Symp. Circuits Syst., May 2002, vol. 1, pp. 665-668.
33. E. Culurciello and A. Andreou, "3D integrated senseors in silicon-on-sapphire CMOS," in Proc. 2006 IEEE Int. Symp. Circuits Syst., 2006, pp. 4959-4962.
34. S. Senturia, Microsystem Design. Norwell, MA: Kluwer, 2001.
35. S. Sze, Physics of Semiconductor Devices, 2nd ed. New York: Wiley, 1981.
36. R. C. Jaeger, Introduction to Microelectronic Fabrication, ser. Modular Series on Solid State Devices, 2nd ed. Upper Saddle River, NJ: Prentice-Hall, 2002, vol. 5.
37. C. Livermore and J. Voldman, "6.777J/2.751J Material Property Database," (2004) [Online]. Available: http://web.mit.edu
38. S. A. Campbell, A. S. Sedra, Ed., The Science and Engineering of Microelectronic Fabrication, ser. The Oxford Series in Electrical and Computer Engineering, 2nd ed. New York: Oxford Univ. Press, 2001.
39. H. T. Sensors, Thermal Conductivity Science (2006) [Online]. Available: http://www.hukseflux.com
40. E. I. du Pont de Nemours and Company, DuPont Wilmington, DE, (2000) [Online]. Available: http://www2.dupont.com
41. MG Chemicals, RTV Silicones by GE, Surrey, BC, Canada, (2006) [Online]. Available: http://www.mgchemicals.com
42. G. Corp. Devon, PA [Online]. Available: http://www.goodfellow.com