On gas permeation in PDMS

Journal of Micromechanics and Microengineering

Volumn 20, Issue 11, 2010, Pages

  Yang, Lung Jieh ^a,b  

^a TAMKANG UNIVERSITY   (Taiwan)

^b NATIONAL APPLIED RESEARCH LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BULK-MICROMACHINED; EXPERIMENTAL DATA; EXPONENTIAL DECAYS; GAS PERMEATION; LEAKAGE PRESSURE; MEMS SENSORS; NONLINEAR DEPENDENCE; PACKAGING SUBSTRATES; POLYDIMETHYLSILOXANE PDMS; PYREX GLASS; THEORETICAL MODELS; THEORETICAL RESULT; TIME VARYING;

ACTUATORS; CURVE FITTING; MICROCHANNELS; PUMPS; SENSORS;

SILICONES;

EID: 78649757191     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/11/115033     Document Type: Article

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