The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition

Applied Physics Letters

Volumn 93, Issue 13, 2008, Pages

  Wang, Qi ^a,b   Wang, Chengbing ^a   Wang, Zhou ^a   Zhang, Junyan ^a   He, Deyan ^b  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b LANZHOU UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; ARCHITECTURAL ACOUSTICS; CARBON; CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; FILM PREPARATION; FOURIER TRANSFORMS; GRAPHITE; HIGH RESOLUTION ELECTRON MICROSCOPY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; HYDROGENATION; HYDROGENOLYSIS; INFRARED SPECTROSCOPY; MICROSCOPIC EXAMINATION; MOLECULAR ORBITALS; MOLECULAR SPECTROSCOPY; PHOTOELECTRON SPECTROSCOPY; PLASMA DEPOSITION; PLASMAS; SPECTRUM ANALYSIS; VAPORS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON RINGS; DIAMOND-LIKE CARBON; FOURIER TRANSFORM INFRARED SPECTRUMS; GRAPHITE SHEETS; HIGH RESOLUTIONS; HYDROGENATED AMORPHOUS CARBON FILMS; LOWER STRESS; NANO-METER SCALE; PULSE PLASMAS; RESIDUAL COMPRESSIVE STRESSES; STRUCTURE ANALYSIS; THICKNESS OF THE FILM; TRANSMISSION ELECTRON;

CARBON FILMS;

EID: 53349090134     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2996273     Document Type: Article

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