Fullerenelike arrangements in carbon nitride thin films grown by direct ion beam sputtering

Applied Physics Letters

Volumn 87, Issue 7, 2005, Pages

  Gago, R ^a,c   Abrasonis, G ^a   Mucklich A ^a   Moller W ^a   Czigany Zs ^b   Radnoczi G ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^c CENTRO DE MICROANÁLISIS DE MATERIALES   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

BASAL PLANES; FORMATION MECHANISMS; GRAPHITIC STRUCTURES; SUBSTRATE TEMPERATURE;

CARBON NITRIDE; FILM GROWTH; MICROSTRUCTURE; SPUTTERING; TEMPERATURE DISTRIBUTION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

FULLERENES;

EID: 24144488221     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2008366     Document Type: Article

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