Very low energy scanning electron microscopy

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 645, Issue 1, 2011, Pages 46-54

  Frank, Luděk ^a   Hovorka, Miloš ^a   Konvalina, Ivo ^a   Mikmeková, Šárka ^a   Müllerová, Ilona ^a  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

Author keywords

Cathode lens; Grain contrast; Low energy electrons; Scanning electron microscopy; Very low energy STEM

Indexed keywords

APPLICATION EXAMPLES; BACK-SCATTERED; CATHODE LENS; ELECTRIC AND MAGNETIC FIELDS; ELECTRON MODES; LOW ENERGIES; LOW ENERGY BEAMS; LOW ENERGY ELECTRONS; LOW-ENERGY RANGE; MULTICHANNEL DETECTION; OBJECTIVE LENS; POLAR ANGLES; SCANNING ELECTRONS; SURFACE NORMALS;

CATHODES; ELECTRON OPTICS; LENSES; MAGNETIC FIELDS; SCANNING ELECTRON MICROSCOPY;

ELECTRONS;

EID: 79958220479     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2010.12.214     Document Type: Conference Paper

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