Collection of secondary electrons in scanning electron microscopes

Journal of Microscopy

Volumn 236, Issue 3, 2009, Pages 203-210

  Mullerova I ^a   Konvalina, I ^a  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

Author keywords

Detection of electrons; Magnetic lenses; Secondary electrons; SEM

Indexed keywords

EFFICIENCY; ELECTROSTATICS; MAGNETIC FIELDS; SCANNING ELECTRON MICROSCOPY; SECONDARY EMISSION;

ABERRATION COEFFICIENTS; COLLECTION EFFICIENCY; DETECTION OF ELECTRON; DETECTION SYSTEM; IMMERSION SYSTEMS; MAGNETIC-FIELD; OBJECTIVE LENS; SCANNING ELECTRONS; SECONDARY ELECTRONS; WORKING DISTANCES;

ELECTRONS;

ARTICLE; CALCULATION; COMPUTER SIMULATION; CONTROLLED STUDY; ELECTRON; MAGNETIC FIELD; OPTICAL INSTRUMENTATION; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRON MICROSCOPY;

EID: 70450176350     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2009.03189.x     Document Type: Article

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