Scanning electron microscopy of nonconductive specimens at critical energies in a cathode lens system

Scanning

Volumn 23, Issue 1, 2001, Pages 36-50

  Frank, L ^a   Zadrazil M ^a   Mullerova I ^a  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

Author keywords

Critical energy; Imaging of insulators; Nonconductive specimens; Scanning electron microscopy; Specimen charging

Indexed keywords

ELECTRON ENERGY LEVELS; ELECTRONS; IRRADIATION;

CATHODE LENS SYSTEM; NONCONDUCTIVE SPECIMENS;

SCANNING ELECTRON MICROSCOPY;

ACCURACY; ARTICLE; CALCULATION; ELECTRIC CONDUCTIVITY; ELECTRICITY; ELECTRON; ENERGY; LENS; MATHEMATICAL ANALYSIS; PRIORITY JOURNAL; RELIABILITY; SCANNING ELECTRON MICROSCOPY; SIGNAL DETECTION;

EID: 0034945951     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950230106     Document Type: Article

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