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Volumn 113, Issue 2, 2002, Pages 67-77

Ultimate resolution limits for scanning electron microscope immersion objective lenses

Author keywords

Low voltage scanning electron microscopy

Indexed keywords

CALCULATIONS; ELECTRIC FIELDS; LENSES; MAGNETIC FIELDS; MATHEMATICAL MODELS; SCANNING ELECTRON MICROSCOPY;

EID: 0036093756     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1078/0030-4026-00118     Document Type: Article
Times cited : (5)

References (16)
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    • Addition of different contributions to the charged particle probe size
    • (1996) Optik , vol.101 , pp. 101-109
    • Bath, J.E.1    Kruit, P.2
  • 11
    • 0034064926 scopus 로고    scopus 로고
    • Initial resolution measurements of an improved magnetic-electrostatic detector objective lens for LVSEM
    • (2000) Ultramicroscopy , vol.81 , pp. 123-127
    • Knell, G.1    Plies, E.2
  • 12
    • 0029389463 scopus 로고
    • Procedures for minimizing the aberrations of electromagnetic compound lenses
    • (1995) Optik , vol.100 , pp. 179-187
    • Preikszas, D.1    Rose, H.2
  • 15
    • 0035017454 scopus 로고    scopus 로고
    • A high resolution add-on lens attachment for scanning electron microscopes
    • (2001) Scanning , vol.23 , pp. 204-210
    • Khursheed, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.