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Volumn 113, Issue 2, 2002, Pages 67-77
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Ultimate resolution limits for scanning electron microscope immersion objective lenses
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Author keywords
Low voltage scanning electron microscopy
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Indexed keywords
CALCULATIONS;
ELECTRIC FIELDS;
LENSES;
MAGNETIC FIELDS;
MATHEMATICAL MODELS;
SCANNING ELECTRON MICROSCOPY;
IMMERSION OBJECTIVE LENSES;
LOW VOLTAGE SCANNING ELECTRON MICROSCOPY;
ULTIMATE RESOLUTION LIMIT;
OPTICAL RESOLVING POWER;
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EID: 0036093756
PISSN: 00304026
EISSN: None
Source Type: Journal
DOI: 10.1078/0030-4026-00118 Document Type: Article |
Times cited : (5)
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References (16)
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