Real image resolution of SEM and low-energy SEM and its optimization: Distribution width of the total surface emission

Ultramicroscopy

Volumn 62, Issue 4, 1996, Pages 261-269

  Frank, L ^a  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; BACKSCATTERING; ELECTRON EMISSION; ELECTRON SCATTERING; LIGHTING; MATHEMATICAL MODELS; MONTE CARLO METHODS; OPTICAL RESOLVING POWER;

ELECTRON OPTICAL COLUMN; MAGNIFICATION; REAL IMAGE RESOLUTION;

SCANNING ELECTRON MICROSCOPY;

ARTICLE; IMAGE ENHANCEMENT; SCANNING ELECTRON MICROSCOPY;

EID: 0030111214     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/0304-3991(95)00156-5     Document Type: Article

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