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Journal of Vacuum Science and Technology B

Volumn 29, Issue 3, 2011, Pages

Fabrication of ordered Au nanodot arrays utilizing anodic aluminum oxide templates formed on Si substrate

(5) Kwon, Namyong a Kim, Namkyu a Yeon, Jekwan b Yeom, Geunyoung b Chung, Ilsub b

a Sungkyunkwan University (South Korea)

b Sungkyunkwan University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ANODIC OXIDATION; ETCHING; FABRICATION; GOLD; NANODOTS; NANOSTRUCTURED MATERIALS; PORE SIZE; SILICON;

ANODIC ALUMINUM OXIDE; ANODIC ALUMINUM OXIDE TEMPLATE; CONTROLLED SIZE; NANO-DOT ARRAYS; NEUTRAL BEAM ETCHING; SECONDARY ELECTRON MICROSCOPY; SI (100) SUBSTRATE; TWO STEP ANODIZATION;

SUBSTRATES;

EID: 79958153277 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3592431 Document Type: Article

Times cited : (12)

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