Fabrication of ordered anodic aluminum oxide with matrix arrays of pores using nanoimprint

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 4, 2009, Pages 803-807

  Kwon, Namyong ^a   Kim, Kyohyeok ^a   Heo, Jinhee ^b   Chung, Ilsub ^b  

^a Sungkyunkwan University   (South Korea)

^b Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AL FILMS; ANODIC ALUMINUM OXIDE; ANODIZING VOLTAGE; HEXAGONAL PATTERN; INTERPORE DISTANCES; LINEAR RELATIONSHIPS; MATRIX ARRAYS; MATRIX PORE; NANO-IMPRINT; OXALIC ACID; SI WAFER; SQUARE ARRAY; SQUARE PATTERNS; SURFACE IMAGE;

ALUMINA; ALUMINUM; ELECTRIC POTENTIAL; METALLIC FILMS; NANOIMPRINT LITHOGRAPHY; SCANNING PROBE MICROSCOPY; SILICON; SILICON WAFERS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 67650337573     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3139884     Document Type: Article

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