Modeling, simulation, and design guidelines for piezoresistive affinity cantilevers

Journal of Microelectromechanical Systems

Volumn 20, Issue 3, 2011, Pages 774-784

  Joshi, Manoj ^a   Gandhi, Prasanna S ^b   Lal, Rakesh ^b   Rao, V Ramgopal ^b   Mukherji, Soumyo ^b  

^a TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

^b INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

Affinity cantilever; nonlinear; piezoresistive

Indexed keywords

AFFINITY CANTILEVER; ANALYTICAL ESTIMATES; APPLIED SURFACE; DESIGN GUIDELINES; FINITE ELEMENT MODELING; FUNCTIONAL ELEMENTS; GEOMETRICAL DIMENSIONS; LIQUID ENVIRONMENT; MATERIAL CHOICE; MATERIAL SELECTION; MICROFABRICATION PROCESS; NONLINEAR; NONLINEAR BEHAVIOR; PIEZO-RESISTIVE; SIMULATION STUDIES;

BIOLOGICAL MATERIALS; DESIGN; FINITE ELEMENT METHOD; LIQUIDS; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; SILICON NITRIDE;

NANOCANTILEVERS;

EID: 79957994802     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2140353     Document Type: Article

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