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Volumn , Issue , 2004, Pages 538-541
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Anhydrous silanization and antibody immobilization on hotwire CVD deposited silicon oxynitride films
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Author keywords
AEAPS; HIgG; HWCVD; Silanization
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Indexed keywords
HIGG;
HWCVD;
SILANIZATION;
CHEMICAL VAPOR DEPOSITION;
ELLIPSOMETRY;
FLUORESCENCE;
MORPHOLOGY;
SILICON;
SPECTROSCOPIC ANALYSIS;
THIN FILMS;
ANTIBODIES;
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EID: 28444486388
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (7)
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References (8)
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