Design and fabrication issues in affinity cantilevers for bioMEMS applications

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1789-1794

  Kale, Nitin S ^a   Rao, V Ramgopal ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

Affinity cantilevers; Antibody immobilization; BioMEMS; Hotwire CVD; Neutral axis; Polymeric cantilevers; Surface stress

Indexed keywords

ANTIBODIES; CHEMICAL VAPOR DEPOSITION; OPTIMIZATION; POLYMERS; STRESSES;

MICROFABRICATED CANTILEVERS; NEUTRAL AXIS; PIEZORESISTIVE MATERIAL; POLYMERIC CANTILEVERS;

BIOSENSORS;

EID: 33845535253     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.886031     Document Type: Article

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