Yield strength of thin-film parylene-C

Microsystem Technologies

Volumn 10, Issue 5, 2004, Pages 407-411

  Shih, C Y ^a   Harder, T A ^a   Tai, Y C ^a  

^a California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFLECTION (STRUCTURES); NOZZLES; PLASTIC DEFORMATION; PUMPS; SILICON; STRESS ANALYSIS; STRUCTURAL LOADS; YIELD STRESS;

LOADING STRESSES; PARYLENES; PRESSURE LOADING; SILICON MEMBRANES;

THIN FILMS;

EID: 4644324503     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0428-x     Document Type: Conference Paper

References (12)

1. Timoshenko S; Woinowsky KS (1959) Theory of plates and shells, 2nd edn. McGraw-Hill, New York
2. Para Tech Coating Inc. (2002) Properties of parylene, http://www.parylene.com.
3. Timoshenko S; MacCullough GH (1940) Elements of strength of materials, 2nd edn. Van Nostrand, New York
4. Wang XQ; Lin Q; Tai YC (1999) A parylene micro check valve. In Proceedings of the 12th IEEE International Conference on Micro Electro Mechanical Systems, (MEMS '99) Florida, USA, pp. 177-182
5. Licklider L; Wang XQ; Desai A; Tai YC; Lee TD (2000) A micromachined chip-based electrospray source for mass spectrometry, Anal. Chem. 72: 367-375
6. Webster JR; Burns MA; Burke DT; Mastrangelo CH (1998) An inexpensive plastic technology for microfabricated capillary electrophoresis chips. Micro Total Analysis Systems '98, Banff, Canada, pp. 249-252
7. Grojean C; Yang X; Tai YC (1999) A thermopneumatic peristaltic micropump. Transducers'99: 1776-1779
8. Sim W et al. (2001) Fabrication, test and simulation of a parylene diaphragm. Transducers 2001, Munich, Germany, pp. 1382-1385
9. Schneider DM; Maibach J; Obermeier E (1995) A new analytical solution for the load-deflection of square membranes, JMicromechSys Vol. 4, no. 4: 238-241
10. Tabata O; Kawahata K; Sugiyama S; Igrashi I (1989) Mechanical property measurements of thin-films using load deflection of composite rectangular membranes. Sensors and Actuators 20: 135-141
11. Harder TA; Yao TJ; He Q; Shin CY; Tai YC (2002) Residual stress in parylene C. In Proceedings of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02): 435-438
12. Popov EP (1990) Engineering mechanics of solids. Prentice Hall, NJ