A PDMS/LTCC bonding technique for microfluidic application

Journal of Micromechanics and Microengineering

Volumn 19, Issue 10, 2009, Pages

  Malecha, Karol ^a   Gancarz, Irena ^a   Golonka, Leszek J ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ATTENUATED TOTAL REFLECTIONS; BEFORE AND AFTER; BONDING METHODS; BONDING PROCESS; BONDING TECHNIQUES; FIRING TEMPERATURE; FT-IR-ATR; GLASS SURFACES; LOW-TEMPERATURE CO-FIRED CERAMICS; MICRO FLUIDIC APPLICATIONS; OXYGEN PLASMA TREATMENTS; OXYGEN PLASMAS; PLASMA TREATMENT; POLYDIMETHYLSILOXANE POLYMERS; SEM;

ANGLE MEASUREMENT; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CONTACT ANGLE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLASS; GLASS CERAMICS; MICROCHANNELS; OXYGEN; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SILICONES; SPECTROSCOPIC ANALYSIS; SURFACES; X RAY PHOTOELECTRON SPECTROSCOPY;

GLASS BONDING;

EID: 70350641546     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/10/105016     Document Type: Article

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