Investigation of the optimal processing parameters for picosecond laser-induced microfabrication of a polymer-ceramic hybrid material

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Kapyla E ^a   Turunen, S ^a   Pelto, J ^a,b   Viitanen, J ^b   Kellomaki M ^a  

^a TAMPERE UNIVERSITY OF TECHNOLOGY   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

3D MICROSTRUCTURES; ATOMIC FORCE; BEAM FOCUS; DAMAGE ZONES; DIFFERENT PROCESS; DIRECT LASER WRITING; FEATURE SIZES; FEMTOSECOND LASER SYSTEM; LASER INDUCED; LASER INTENSITIES; LASER POWER; NANO-METER SCALE; OPTIMAL PROCESSING; PICOSECOND LASER; PICOSECONDS; PROCESS PARAMETERS; SCANNING SPEED; STRUCTURE DIMENSIONS; SURFACE FEATURE; SUSPENDED STRUCTURE; TWO PHOTON POLYMERIZATION; VERY HIGH RESOLUTION;

ATOMIC FORCE MICROSCOPY; CERAMIC MATERIALS; FABRICATION; HYBRID MATERIALS; LASER BEAMS; MICROSTRUCTURE; MULTIPHOTON PROCESSES; POLYMERIZATION; POLYMERS; SCANNING; SCANNING ELECTRON MICROSCOPY; ULTRAFAST LASERS; ULTRASHORT PULSES;

NEODYMIUM LASERS;

EID: 79957943458     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/065033     Document Type: Article

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