Micron-sized mechanical oscillators created by 3D two-photon polymerization: Towards a mechanical logic device

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1261-1264

  Knoll, A ^a,b   Durig U ^a   Zuger O ^c   Guntherodt H J ^b  

^a IBM RESEARCH ZURICH   (Switzerland)

^b UNIVERSITY OF BASEL   (Switzerland)

^c Balzers AG   (Liechtenstein)

Author keywords

Direct laser writing; Logic; MEMS; Mixer; Polymer; SU8; Two photon polymerization

Indexed keywords

ACTUATORS; ELECTRODES; MICROELECTROMECHANICAL DEVICES; PHOTONS; POLYMERIZATION; RESONATORS;

DIRECT LASER WRITING; MIXER; SU8; TWO-PHOTON POLYMERIZATION;

OSCILLATORS (MECHANICAL);

EID: 33646030293     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.219     Document Type: Article

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