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Thin Solid Films

Volumn 519, Issue 15, 2011, Pages 4906-4909

Raman spectroscopy and mechanical properties of multilayer tetrahedral amorphous carbon films

(5) Wang, Sai a Zhu, Jiaqi a Wang, Jiazhi a Yin, Xunbo a Han, Xiao a

a HARBIN INSTITUTE OF TECHNOLOGY (China)

Author keywords

Amorphous materials; Mechanical properties; Multilayer; Thin films; Vapor deposition

Indexed keywords

FILTERED CATHODIC VACUUM ARC; HIGH ELASTIC MODULUS; HIGH HARDNESS; IMPEDENCE; INTRINSIC STRESS; MULTILAYER STRUCTURES; NANOINDENTERS; SOLIDLY MOUNTED RESONATOR; SUBSTRATE BIAS; TETRAHEDRAL AMORPHOUS CARBON (TA-C) FILMS; TETRAHEDRAL AMORPHOUS CARBON FILMS; VISIBLE RAMAN SPECTROSCOPY;

ACOUSTIC SPECTROSCOPY; ACOUSTICS; AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; FILM PREPARATION; HARDNESS; MATERIALS PROPERTIES; MULTILAYERS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; VACUUM APPLICATIONS;

MULTILAYER FILMS;

EID: 79957666673 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.01.051 Document Type: Conference Paper

Times cited : (16)

References (23)

1
- 41749086226
- R. Ruby IEEE Ultrason. Symp. 2007 1029
- (2007) IEEE Ultrason. Symp. , pp. 1029
- Ruby, R.¹

2
- 79957638763
- G.G. Fattinger IEEE Ultrason. Symp. 2008 762
- (2008) IEEE Ultrason. Symp. , pp. 762
- Fattinger, G.G.¹

3
- 48149113964
- J. Kaitila IEEE Ultrason. Symp. 2007 120
- (2007) IEEE Ultrason. Symp. , pp. 120
- Kaitila, J.¹

4
- 78651262429
- G. Liu, J.Q. Zhu, S. Wang, X.X. Lu, Y.P. Liu, S.Y. Huo, and X.W. Yuan J. Inorg. Mater. 25 2010 1233
- (2010) J. Inorg. Mater. , vol.25 , pp. 1233
- Liu, G.¹ Zhu, J.Q.² Wang, S.³ Lu, X.X.⁴ Liu, Y.P.⁵ Huo, S.Y.⁶ Yuan, X.W.⁷

5
- 79957642199
- E. Dekempeneer, K. Van Acker, K. Vercammen, J. Meneve, D. Neerinck, S. Eufinger, W. Pappaert, M. Sercu, and J. Smeets Surf. Coat. Technol. 669 2001 142
- (2001) Surf. Coat. Technol. , vol.669 , pp. 142
- Dekempeneer, E.¹ Van Acker, K.² Vercammen, K.³ Meneve, J.⁴ Neerinck, D.⁵ Eufinger, S.⁶ Pappaert, W.⁷ Sercu, M.⁸ Smeets, J.⁹

6
- 0000075431
- T.A. Friedmann, J.P. Sullivan, J.A. Knapp, D.R. Tallant, D.M. Follstaedt, D.L. Medlin, and P.B. Mirkarimi Appl. Phys. Lett. 71 1997 3820
- (1997) Appl. Phys. Lett. , vol.71 , pp. 3820
- Friedmann, T.A.¹ Sullivan, J.P.² Knapp, J.A.³ Tallant, D.R.⁴ Follstaedt, D.M.⁵ Medlin, D.L.⁶ Mirkarimi, P.B.⁷

7
- 33646141842
- C.T. Ha Peter, D.R. Mckenzie, M.M.M. Bilek, E.D. Doyle, D.G. McCulloch, and P.K. Chu Surf. Coat. Technol. 200 2006 6405
- (2006) Surf. Coat. Technol. , vol.200 , pp. 6405
- Ha Peter, C.T.¹ McKenzie, D.R.² Bilek, M.M.M.³ Doyle, E.D.⁴ McCulloch, D.G.⁵ Chu, P.K.⁶

8
- 7544249733
- W. Zhang, A. Tanaka, K. Wazumi, Y. Koga, and B.S. Xu Diamond Relat. Mater. 13 2004 2166
- (2004) Diamond Relat. Mater. , vol.13 , pp. 2166
- Zhang, W.¹ Tanaka, A.² Wazumi, K.³ Koga, Y.⁴ Xu, B.S.⁵

9
- 0033131842
- S. Logothetidis, M. Gioti, C. Charitides, and P. Patsalas Vacuum 53 1999 61
- (1999) Vacuum , vol.53 , pp. 61
- Logothetidis, S.¹ Gioti, M.² Charitides, C.³ Patsalas, P.⁴

10
- 69549107998
- J.Q. Zhu, S. Wang, C.Z. Jiang, Y. Dang, and S.Y. Du Appl. Phys. A 97 1 2009 195
- (2009) Appl. Phys. A , vol.97 , Issue.1 , pp. 195
- Zhu, J.Q.¹ Wang, S.² Jiang, C.Z.³ Dang, Y.⁴ Du, S.Y.⁵

11
- 79957634127
- L.G. Cancado, A. Jorio, and M.A. Pimenta Phys. Rev. B 76 2007 0643034
- (2007) Phys. Rev. B , vol.76 , pp. 0643034
- Cancado, L.G.¹ Jorio, A.² Pimenta, M.A.³

12
- 0032486037
- B.K. Tay, X. Shi, H.S. Tan, H.S. Yang, and Z. Sun Surf. Coat. Technol. 105 1998 155
- (1998) Surf. Coat. Technol. , vol.105 , pp. 155
- Tay, B.K.¹ Shi, X.² Tan, H.S.³ Yang, H.S.⁴ Sun, Z.⁵

13
- 0242603790
- A.C. Ferrari, and J. Robertson Phys. Rev. B 61 2000 14095
- (2000) Phys. Rev. B , vol.61 , pp. 14095
- Ferrari, A.C.¹ Robertson, J.²

14
- 0029485119
- B.K. Gupta, and B. Bhushan Thin Solid Films 270 1-2 1995 391
- (1995) Thin Solid Films , vol.270 , Issue.1-2 , pp. 391
- Gupta, B.K.¹ Bhushan, B.²

15
- 0010005593
- D.R. Mckenzie, D. Muller, and B.A. Pailthorpe Phys. Rev. Lett. 67 1991 773
- (1991) Phys. Rev. Lett. , vol.67 , pp. 773
- McKenzie, D.R.¹ Muller, D.² Pailthorpe, B.A.³

16
- 0043059594
- J. Robertson Diamond Relat. Mater. 2 1993 984
- (1993) Diamond Relat. Mater. , vol.2 , pp. 984
- Robertson, J.¹

17
- 0034049733
- S. Logothetidis, M. Gioti, C. Charitides, Y. Panayiotatos, M. Handrea, and W. Kautek Diamond Relat. Mater. 9 2000 756
- (2000) Diamond Relat. Mater. , vol.9 , pp. 756
- Logothetidis, S.¹ Gioti, M.² Charitides, C.³ Panayiotatos, Y.⁴ Handrea, M.⁵ Kautek, W.⁶

18
- 0032621358
- C. Charitidis, S. Logothetidis, and P. Douka Diamond Relat. Mater. 8 1999 558
- (1999) Diamond Relat. Mater. , vol.8 , pp. 558
- Charitidis, C.¹ Logothetidis, S.² Douka, P.³

19
- 79957628306
- S. Logothetidis, S. Kassavetis, C. Charitides, Y. Panayiotatos, and A. Laskarakis Carbon 42 2004 133
- (2004) Carbon , vol.42 , pp. 133
- Logothetidis, S.¹ Kassavetis, S.² Charitides, C.³ Panayiotatos, Y.⁴ Laskarakis, A.⁵

20
- 0034324823
- A. Leyland, and A. Matthews Wear 246 2000 1
- (2000) Wear , vol.246 , pp. 1
- Leyland, A.¹ Matthews, A.²

21
- 0036645507
- L.Y. Huang, J.W. Zhao, K.W. Xu, and J. Lu Diamond Relat. Mater. 11 2002 1454
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1454
- Huang, L.Y.¹ Zhao, J.W.² Xu, K.W.³ Lu, J.⁴

22
- 2442455503
- J.P. Quinn, P.L. emoine, P. Maguire, and J.A. Mclaughlin Diamond Relat. Mater. 13 2004 1385
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1385
- Quinn, J.P.¹ Emoine, P.L.² Maguire, P.³ McLaughlin, J.A.⁴

23
- 0035448759
- J. Qi, K.H. Lai, C.S. Lee, I. Bello, S.T. Lee, J.B. Luo, and S.Z. Wen Diamond Relat. Mater. 10 2001 833
- (2001) Diamond Relat. Mater. , vol.10 , pp. 833
- Qi, J.¹ Lai, K.H.² Lee, C.S.³ Bello, I.⁴ Lee, S.T.⁵ Luo, J.B.⁶ Wen, S.Z.⁷

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