Fabrication of fluidic chips with 1-D nanochannels on PMMA substrates by photoresist-free UV-lithography and UV-assisted low-temperature bonding

Microfluidics and Nanofluidics

Volumn 10, Issue 6, 2011, Pages 1223-1232

  Hu, Xianqiao ^a   He, Qiaohong ^a   Zhang, Xiangbo ^a   Chen, Hengwu ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Fabrication of nano fluidic chips; Photoresist free UV lithography; PMMA; UV assisted low temperature bonding

Indexed keywords

LOW TEMPERATURE BONDING; NANO CHANNELS; NOVEL METHODS; PHOTORESIST-FREE; PMMA; RUNNING WATERS; UV LITHOGRAPHY; UV-LIGHT;

FABRICATION; LITHOGRAPHY; PHOTORESISTS; SUBSTRATES;

BONDING;

EID: 79956098361     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-010-0753-6     Document Type: Article

References (46)

1. P Abgrall NT Nguyen 2008 Nanofluidic devices and their applications Anal Chem 80 2326 2341 10.1021/ac702296u (Pubitemid 351499814)
2. P Abgrall LN Low NT Nguyen 2007 Fabrication of planar nanofluidic channels in a thermoplastic by hot-embossing and thermal bonding Lab Chip 7 520 522 10.1039/b616134k (Pubitemid 46496549)
3. M Cabodi SWP Turner HG Craighead 2002 Entropic recoil separation of long DNA molecules Anal Chem 74 5169 5174 10.1021/ac025879a (Pubitemid 35215344)
4. DM Cannon BR Flachsbart MA Shannon JV Sweedler PW Bohn 2004 Fabrication of single nanofluidic channels in poly(methylmethacrylate) films via focused-ion beam milling for use as molecular gates Appl Phys Lett 85 1241 1243 10.1063/1.1780605
5. R Chantiwas ML Hupert SR Pullagurla S Balamurugan JT López S Park P Datta J Goettert YK Cho SA Soper 2010 Simple replication methods for producing 1D nanoslits in thermoplastics and the transport dynamics of double-stranded DNA through these slits Lab Chip 10 3255 3264 10.1039/c0lc00096e
6. YH Cho J Park H Park X Cheng BJ Kim A Han 2010 Fabrication of high-aspect-ratio polymer nanochannels using a novel Si nanoimprint mold and solvent-assisted sealing Microfluid Nanofluid 9 163 170 10.1007/s10404-009-0509- 3
7. HJGE Gardeniers 2009 Chemistry in nanochannel confinement Anal Bioanal Chem 394 385 397 10.1007/s00216-009-2672-5
8. BD Gates QB Xu M Stewart D Ryan CG Willson GM Whitesides 2005 New approaches to nanofabrication: molding, printing, and other techniques Chem Rev 105 1171 1196 10.1021/cr030076o (Pubitemid 40600879)
9. DS Ginger H Zhang CA Mirkin 2004 The evolution of dip-pen nanolithography Angew Chem Int Ed 43 30 45 10.1002/anie.200300608 (Pubitemid 38063469)
10. M Haiducu M Rahbar IG Foulds RW Johnstone D Sameoto M Parameswaran 2008 Deep-UV patterning of commercial grade PMMA for low-cost, large-scale microfluidics J Micromech Microeng 18 115029 10.1088/0960-1317/18/11/115029
11. J Han HG Craighead 2000 Separation of long DNA molecules in a microfabricated entropic trap array Science 288 1026 1029 10.1126/science.288. 5468.1026 (Pubitemid 30324230)
12. QH He S Chen 2008 Fabricating technologies of nanofluidic chips and their applications Prog Chem (Chin J) 12 2061 2067
13. QH He S Chen Y Su Q Fang HW Chen 2008 Fabrication of 1D nanofluidic channels on glass substrate by wet etching and room-temperature bonding Anal Chim Acta 628 1 8 10.1016/j.aca.2008.08.040
14. XH Huang MJ Gordon RN Zare 1988 Current-monitoring method for measuring the electroosmotic flow rate in capillary zone electrophoresis Anal Chem 60 1837 1838 10.1021/ac00168a040
15. ZJ Jia Q Fang ZL Fang 2004 Bonding of glass microfluidic chips at room temperatures Anal Chem 76 5597 5602 10.1021/ac0494477 (Pubitemid 39249450)
16. RW Johnstone IG Foulds M Parameswaran 2008 Deep-UV exposure of poly(methyl methacrylate) at 254 nm using low-pressure mercury vapor lamps J Vac Sci Technol B 26 682 685 10.1116/1.2890688 (Pubitemid 351474177)
17. H Kaczmarek A Kaminska A van Herk 2000 Photooxidative degradation of poly(alkyl methacrylate)s Eur Polym J 36 767 777 10.1016/S0014-3057(99)00125-1
18. SM Kim MA Burns EF Hasselbrink 2006 Electrokinetic protein preconcentration using a simple glass/poly(dimethylsiloxane) microfluidic chip Anal Chem 78 4779 4785 10.1021/ac060031y (Pubitemid 44100610)
19. SJ Kim YA Song JY Han 2010 Nanofluidic concentration devices for biomolecules utilizing ion concentration polarization: theory, fabrication, and applications Chem Soc Rev 39 912 922 10.1039/b822556g
20. Y Kong HW Chen YR Wang SA Steven 2006 Fabrication of a gold microelectrode for amperometric detection on a polycarbonate electrophoresis chip by photodirected electroless plating Electrophoresis 27 2940 2950 10.1002/elps.200500750 (Pubitemid 44160845)
21. Y Kong HW Chen X Yun ZX Hao ZL Fang 2007 A simple photomask with photoresist mask layer for ultraviolet-photolithography and its application for selectively photochemical surface modification of polymers Chin J Anal Chem 35 623 627 10.1016/S1872-2040(07)60049-8
22. ML Kovarik SC Jacobson 2009 Nanofluidics in lab-on-a-chip devices Anal Chem 81 7133 7140 10.1021/ac900614k
23. M Krishnan I Monch P Schwille 2007 Spontaneous stretching of DNA in a two-dimensional nanoslit Nano Lett 7 1270 1275 10.1021/nl0701861 (Pubitemid 46834407)
24. JH Lee S Chung SJ Kim JY Han 2007 Poly(dimethylsiloxane)-based protein preconcentration using a nanogap generated by junction gap breakdown Anal Chem 79 6868 6873 10.1021/ac071162h (Pubitemid 47395080)
25. KF Lei S Ahsan N Budraa WJ Li JD Mai 2004 Microwave bonding of polymer-based substrates for potential encapsulated micro/nanofluidic device fabrication Sens Actuator A 114 340 346 10.1016/j.sna.2003.12.018
26. T Lippert JT Dickinson 2003 Chemical and spectroscopic aspects of polymer ablation: special features and novel directions Chem Rev 103 453 485 10.1021/cr010460q
27. KA Mahabadi I Rodriguez SC Haur JA van Kan AA Bettiol F Watt 2006 Fabrication of PMMA micro- and nanofluidic channels by proton beam writing: electrokinetic and morphological characterization J Micromech Microeng 16 1170 1180 10.1088/0960-1317/16/7/009 (Pubitemid 43884492)
28. P Mao JY Han 2005 Fabrication and characterization of 20 nm planar nanofluidic channels by glass-glass and glass-silicon bonding Lab Chip 5 837 844 10.1039/b502809d (Pubitemid 41117310)
29. RL McCarley B Vaidya SY Wei AF Smith AB Patel J Feng MC Murphy SA Soper 2005 Resist-free patterning of surface architectures in polymer-based microanalytical devices J Am Chem Soc 127 842 843 10.1021/ja0454135 (Pubitemid 40144277)
30. D Mijatovic JCT Eijkel A van den Berg 2005 Technologies for nanofluidic systems: top-down vs. bottom-up-a review Lab Chip 5 492 500 10.1039/b416951d (Pubitemid 40676814)
31. M Napoli JCT Eijkel S Pennathur 2010 Nanofluidic technology for biomolecule applications: a critical review Lab Chip 10 957 985 10.1039/b917759k
32. MJ O'Brien P Bisong LK Ista EM Rabinovich AL Garcial SS Sibbett GP Lopez SRJ Brueck 2003 Fabrication of an integrated nanofluidic chip using interometric lithography J Vac Sci Technol B 21 2941 2945 10.1116/1.1625964
33. JL Perry SG Kandlikar 2006 Review of fabrication of nanochannels for single phase liquid flow Microfluid Nanofluid 2 185 193 10.1007/s10404-005-0068- 1
34. QS Pu J Yun H Temkin SR Liu 2004 Ion-enrichment and ion-depletion effect of nanochannel structures Nano Lett 4 1099 1103 10.1021/nl0494811 (Pubitemid 38859989)
35. P Sivanesan K Okamoto D English CS Lee DL DeVoe 2005 Polymer nanochannels fabricated by thermomechanical deformation for single-molecule analysis Anal Chem 77 2252 2258 10.1021/ac048923q (Pubitemid 40463844)
36. R Srinivasan S Lazare 1985 Modification of polymer surfaces by far-ultraviolet radiation of low and high (laser) intensities Polymer 26 1297 1300 10.1016/0032-3861(85)90302-7
37. CW Tsao DL DeVoe 2009 Bonding of thermoplastic polymer microfluidics Microfluid Nanofluid 6 1 16 10.1007/s10404-008-0361-x
38. CW Tsao L Hromada J Liu P Kumar DL Devoe 2007 Low temperature bonding of PMMA and COC microfluidic substrates using UV/ozone surface treatment Lab Chip 7 499 505 10.1039/b618901f (Pubitemid 46496556)
39. YC Wang AL Stevens JY Han 2005 Million-fold preconcentration of proteins and peptides by nanofluidic filter Anal Chem 77 4293 4299 10.1021/ac050321z (Pubitemid 41542245)
40. XY Wang SL Wang V Veerappan CK Byun H Nguyen B Gendhar RD Allen SR Liu 2008 Bare nanocapillary for DNA separation and genotyping analysis in gel-free solutions without application of external electric field Anal Chem 80 5583 5589 10.1021/ac800549k
41. SY Wei B Vaidya AB Patel SA Soper RL McCarley 2005 Photochemically patterned poly(methyl methacrylate) surfaces used in the fabrication of microanalytical devices J Phys Chem B 109 16988 16996 10.1021/jp051550s (Pubitemid 41367443)
42. DP Wu AJ Steckl 2009 High speed nanofluidic protein accumulator Lab Chip 9 1890 1896 10.1039/b823409d
43. B Yang VR Dukkipati D Li BL Cardozo SW Pang 2007 Stretching and selective immobilization of DNA in SU-8 micro- and nanochannels J Vac Sci Technol B 25 2352 2356 10.1116/1.2806975 (Pubitemid 350255896)
44. S Yasin DG Hasko H Ahmed 2001 Fabrication of <5 nm width lines in poly(methylmethacrylate) resist using a water: isopropyl alcohol developer and ultrasonically-assisted development Appl Phys Lett 78 2760 2762 10.1063/1.1369615
45. H Yu Y Lu YG Zhou FB Wang FY He XH Xia 2008 A simple, disposable microfluidic device for rapid protein concentration and purification via direct-printing Lab Chip 8 1496 1501 10.1039/b802778a
46. JY Zhang H Esrom U Kogelschatz G Emig 1994 Modification of polymers with UV excimer radiation from lasers and lamps J Adhes Sci Technol 8 1179 1210 10.1163/156856194X01022