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Volumn 88, Issue 2, 2000, Pages 1181-1183
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The finite size effect in a planar inductively coupled plasma
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0005542274
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.373794 Document Type: Article |
Times cited : (26)
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References (23)
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