Silicon microtoroidal resonators with integrated MEMS tunable coupler

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 13, Issue 2, 2007, Pages 202-208

  Yao, Jin ^b   Leuenberger, David ^c   Lee, Ming Chang M ^a,d   Wu, Ming C ^a,b  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Integrated optics; Optical resonators; Surface roughness; Tunable

Indexed keywords

INTEGRATED OPTICS; MEMS; Q FACTOR MEASUREMENT; SILICON; SINGLE CRYSTAL SURFACES; SURFACE ROUGHNESS; WAFER BONDING;

EXTINCTION RATIO; HYDROGEN ANNEALING; TUNABLE OPTICAL COUPLERS;

OPTICAL RESONATORS;

EID: 34247545125     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2007.893743     Document Type: Article

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