Dual-gate ZnO thin-film transistors with SiNx as dielectric layer

IEICE Transactions on Electronics

Volumn E94-C, Issue 5, 2011, Pages 786-790

  Kim, Young Su ^a   Kang, Min Ho ^a   Jeong, Kang Suk ^b   Oh, Jae Sub ^a   Kim, Yumi ^b   Yoo, Dong Eun ^a   Lee, Hi Deok ^b   Lee, Ga Won ^b  

^a National Nano Fab Center (NNFC)   (South Korea)

^b Chungnam National University   (South Korea)

Author keywords

Dual gate; Sputter; TFT; ZnO

Indexed keywords

DIELECTRIC MATERIALS; FILM THICKNESS; GATE DIELECTRICS; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; SPUTTERING; THIN FILM CIRCUITS; THIN FILMS; THRESHOLD VOLTAGE; ZINC OXIDE;

CHANNEL LENGTH; CHANNEL WIDTHS; DIELECTRIC LAYER; DUAL GATES; FIELD-EFFECT MOBILITIES; RF-MAGNETRON SPUTTERING; SUBTHRESHOLD SWING; ZNO THIN FILM;

THIN FILM TRANSISTORS;

EID: 79955590360     PISSN: 09168524     EISSN: 17451353     Source Type: Journal    
DOI: 10.1587/transele.E94.C.786     Document Type: Article

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