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Volumn 50, Issue 4 PART 2, 2011, Pages

Reference electrode-insulator-nitride-oxide-semiconductor structure with Sm2O3 sensing membrane for pH-sensor application

(7) Wang, Jer Chyi a Lu, Tseng Fu a Shih, Hui Yu a Yang, Chia Ming b Lai, Chao Sung a Kao, Chyuan Haur a Pan, Tung Ming a

a CHANG GUNG UNIVERSITY (Taiwan)

b Inotera Memories (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED VOLTAGES; BAND DIAGRAMS; BLOCKING LAYERS; ELECTROLYTE-INSULATOR-SEMICONDUCTOR; HIGH PH; HYDROGEN IONS; OXIDE NITRIDE OXIDES; PH DETECTION; PH SENSITIVITY; PH VARIATION; REFERENCE ELECTRODES; SEMICONDUCTOR STRUCTURE; SENSING MECHANISM; SENSING MEMBRANES; SENSING RESPONSE; SENSOR APPLICATIONS; STRESS VOLTAGES; TRAPPED ELECTRONS; ULTRA-SMALL;

CHARGE TRAPPING; ELECTROCHEMICAL ELECTRODES; GAS ADSORPTION; PH SENSORS; SCHEMATIC DIAGRAMS; SILICON NITRIDE; SILICON OXIDES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 79955448037 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.50.04DL09 Document Type: Article

Times cited : (2)

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