Study of mechanical stability of suspended bridge devices used as pH sensors

Journal of Non-Crystalline Solids

Volumn 352, Issue 9-20 SPEC. ISS., 2006, Pages 1246-1249

  Bendriaa, F ^a   Le Bihan, F ^a   Salaun A C ^a   Mohammed Brahim, T ^a   Bonnaud, O ^a  

^a UNIVERSITÉ DE RENNES 1   (France)

Author keywords

MEMs; Sensors; Thin film transistors

Indexed keywords

BORON; DOPING (ADDITIVES); FIELD EFFECT TRANSISTORS; PH EFFECTS; POLYSILICON; SENSORS; STABILITY; THIN FILM TRANSISTORS; THIN FILMS;

BORON DOPED POLYSILICON FILMS; MECHANICAL STABILITY; POSITIVE MECHANICAL STRESS; SUSPENDED GATE FIELD EFFECT TRANSISTORS;

SUSPENSION BRIDGES;

EID: 33744513031     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2005.09.055     Document Type: Article

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