Etching and structure changes in PMMA coating under argon plasma immersion ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 269, Issue 12, 2011, Pages 1361-1369

  Kondyurin, Alexey ^a   Bilek, Marcela ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Ellipsometry; FTIR; Plasma immersion ion implantation; PMMA

Indexed keywords

ARGON PLASMAS; CARBONIZATION PROCESS; CHEMICAL STRUCTURE; CONCENTRATION CHANGE; EXTINCTION COEFFICIENTS; FTIR; FTIR SPECTROSCOPY; ION BEAM TREATMENT; ION FLUENCES; METHYLENE GROUPS; PLASMA IMMERSION ION IMPLANTATION; PMMA; PULSED BIAS; STRUCTURE CHANGE; STRUCTURE TRANSFORMATIONS;

ARGON; CARBONIZATION; COATINGS; ELLIPSOMETRY; ETCHING; ETHERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BEAMS; ION IMPLANTATION; PLASMA APPLICATIONS; REFRACTIVE INDEX;

IONS;

EID: 79955437575     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2011.04.001     Document Type: Article

References (53)

1. C. Ozcan, and N. Hasirci J. Biomater. Sci. Polym. Ed. 18 6 2007 759 773
2. M. Yoshinari, T. Kato, K. Matsuzaka, T. Hayakawa, T. Inoue, Y. Oda, K. Okuda, and M. Shimono J. Biomed. Mater. Res. B Appl. Biomater. 77 1 2006 47 54
3. J.B. Lhoest, J.L. Dewez, and P. Bertrand PMMA surface modification under keV and MeV ion bombardment in relation to mammalian cell adhesion Nucl. Instrum. Meth. Phys. Res. B 105 1995 322 327
4. Lihua Zhang, Di Wu, Yashao Chen, Xiaoli Wang, Guowei Zhao, Haiyan Wan, and Changzheng Huang Surface modification of polymethyl methacrylate intraocular lenses by plasma for improvement of antithrombogenicity and transmittance Appl. Surf. Sci. 255 2009 6840 6845
5. F. Galli, S. Benedetti, U. Buoncristiani, M. Piroddi, C. Conte, F. Canestrari, E. Buoncristiani, and A. Floridi Kidney Int. 64 2 2003 748 755
6. Dilek Cokeliler, Selim Erkut, Josef Zemek, Hynek Biederman, and Mehmet Mutlu Modification of glass fibers to improve reinforcement: A plasma polymerization technique Dent. Mater. 23 2007 335 342 (Pubitemid 46135732)
7. K.T. Chu, Y. Oshida, E.B. Hancock, M.J. Kowolik, T. Barco, and S. Zunt Hydroxyapatite/PMMA composites as bone cements Biomed. Mater. Eng. 14 1 2004 87 105 (Pubitemid 38173809)
8. K.E. Schmalenberg, H.M. Buettner, and K.E. Uhrich Microcontact printing of proteins oxygen plasma-activated poly(methyl methacrylate) Biomaterials 25 2004 1851 1857 (Pubitemid 38111174)
9. Sundar Babu, Sakya Mohapatra, Leonid Zubkov, Sreekant Murthy, and Elisabeth Papazoglou A PMMA microcapillary quantum dot linked immunosorbent assay (QLISA) Biosens. Bioelectron. 24 2009 3467 3474
10. Ulrike Schulz, Peter Munzert, and Norbert Kaiser Surface modification of PMMA by DC glow discharge and microwave plasma treatment for the improvement of coating adhesion Surf. Coat. Technol. 142 2001 507 511 (Pubitemid 32931754)
11. .E. Sarantopoulou, Z. Kollia, A.C. Cefalas, K. Manoli, M. Sanopoulou, D. Goustouridis, S. Chatzandroulis, and I. Raptis Surface nano/micro functionalization of PMMA thin films by 157 nm irradiation for sensing applications Appl. Surf. Sci. 254 2008 1710 1719
12. I. Rajta, S.Z. Szilasi, J. Budai, Z. Toth, P. Petrik, and E. Baradacs Refractive index depth profile in PMMA due to proton irradiation Nucl. Instrum. Meth. Phys. Res. B 260 2007 400 404 (Pubitemid 46881183)
13. M.I.J. Beale, C. Broughton, A.J. Pidduck, and V.G.I. Deshmukh The mechanisms of ion beam modification of PMMA for dry etch development ion beam lithography Nucl. Instrum. Meth. Phys. Res. B 19 20 1987 995 1000 (Pubitemid 17564543)
14. R. Muehle, and G. Goetz Ion beam exposure of PMMA polymer resist Vacuum 38 11 1988 1005 1006
15. M.I.J. Beale, C. Broughton, A. Pidduck, F.G.H. Smith, A.G. Brown, V.G.I. Deshmukh, T.W. Janes, S.H. Mortimer, and S.J. Till The mechanism of ion implantation passivation of PMMA for lithography with dry etch development Microelectron. Eng. 3 1985 451 458 (Pubitemid 16479786)
16. M. Lanagan, S. Lindsey, and N.S. Viswanathan Deep UV ablation of PMMA resists Jpn. J. Appl. Phys. 22 2 1983 L67 L69
17. Huigao Duan, Jianguo Zhao, Yongzhe Zhang, Erqing Xie, and Li Han Preparing patterned carbonaceous nanostructures directly by overexposure of PMMA using electron-beam lithography Nanotechnology 20 135306 2009 8 9
18. E.M. Lehockey, and I. Reid Vapour development of PMMA resists under X-ray exposure Surf. Interface Anal. 11 1988 302 306 (Pubitemid 18630982)
19. N. Vourdas, A.G. Boudouvis, and E. Gogolides Plasma etch rate measurements of thin PMMA films and correlation with the glass transition temperature J. Phys: Conf. Ser. 10 2005 405 408 (Pubitemid 41016578)
20. M. Timothy Long, A. Shaurya Prakash, Mark S. Shannon, and Jeffrey Moore Water-vapor plasma-based surface activation for trichlorosilane modification of PMMA Langmuir 22 2006 4104 4109
21. Nikolaos Vourdas, Angeliki Tserepi, and Evangelos Gogolides Nanotextured super-hydrophobic transparent poly(methyl methacrylate) surfaces using high-density plasma processing Nanotechnology 18 125304 2007 7 8
22. Michael Zeuner, Jurgen Meichsner, and Hans-Ulrich Poll Oxidative decomposition of polymethylmethacrylate (PMMA) in plasma etching Plasma Source Sci. Technol. 4 1995 406 415
23. Dhananjay S. Bodas, and S.A. Gangal Structural characterization of sputtered PMMA in argon plasma Mater. Lett. 59 2005 2903 2907 (Pubitemid 41089423)
24. U. Schulz, P. Munzert, R. Leitel, I. Wendling, N. Kaiser, and A. Tünnermann Antireflection of transparent polymers by advanced plasma etching procedures Opt. Express. 15 20 2007 13108 13113 (Pubitemid 47538419)
25. L. Calcagno, G. Compagnini, and G. Foti Structural modification of polymer film by ion irradiation Nucl. Instr. Meth. B62 1992 413 422
26. 2/Ar-based discharges J. Micromech. Microeng. 14 2004 663 666
27. + implanted PMMA Vacuum 83 2009 S252 S255
28. G.B. Hadjichristov, V.K. Gueorguiev, Tz.E. Ivanov, Y.G. Marinov, V.G. Ivanov, and E. Faulques Silicon ion implanted PMMA for soft electronics Org. Electron. 9 2008 1051 1060
29. T.C. Sum, A.A. Bettiol, H.L. Seng, I. Rajta, J.A. van Kan, and F. Watt Proton beam writing of passive waveguides in PMMA Nucl. Instrum. Meth. Phys. Res. B 210 2003 266 271
30. D.M. Rueck, S. Brunner, K. Tinschert, and W.F.X. Frank Production of buried waveguides in PMMA by high energy ion implantation Nucl. Instrum. Meth. Phys. Res. B 106 1995 447 451
31. Wan Hong, Hyung-Joo Woo, Han-Woo Choi, Young-Suk Kim, and Gi-dong Kim Optical property modification of PMMA by ion-beam implantation Appl. Surf. Sci. 169-170 2001 428 432 (Pubitemid 32195610)
32. B. Pignataro, M.E. Fragala, and O. Puglisi AFM and XPS study of ion bombarded poly(methyl methacrylate) Nucl. Instrum. Meth. Phys. Res. B 13 1997 141 148 (Pubitemid 127367216)
33. J. Davenas, P. Thevenard, G. Boiteux, M. Fallavier, and X.L. Lu Hydrogenated carbon layers produced by ion beam irradiation of PMMA and polystyrene films Nucl. Instrum. Meth. Phys. Res. B 46 1990 317 323 (Pubitemid 20664012)
34. G. Compagnini, G.G.N. Angilella, A. Raudino, and O. Puglisi Memory effect on ion beam-induced depolymerization of PMMA Nucl. Instrum. Meth. Phys. Res. B 175 177 2001 559 563 (Pubitemid 32528938)
35. A. Raudino, M.E. Fragala, G. Compagnini, and O. Puglisi J. Chem. Phys. 111 1999 1721
36. A.L. Stepanov, V.N. Popok, I.B. Khaibullin, and U. Kreibig Optical properties of polymethylmethacrilate with implanted silver nanoparticles Nucl. Instrum. Meth. Phys. Res. B 191 2002 473 477 (Pubitemid 34613985)
37. J.P. Biersack, and R. Kallweit Ion beam induced changes of the refractive index of PMMA Nucl. Instrum. Meth. Phys. Res. B 46 1990 309 312 (Pubitemid 20664010)
38. J. Zekonyte, V. Zaporojtchenko, and F. Faupel Investigation of the drastic change in the sputter rate of polymers at low ion fluence Nucl. Instrum. Meth. Phys. Res. B 236 2005 241 248 (Pubitemid 40929302)
39. D. Fink Fundamentals of Ion-Irradiated Polymers 2004 Springer Berlin
40. V.B. Odzhaev, I.P. Kozlov, V.N. Popok, and D.B. Sviridov Ion Implantation of Polymers 1998 Belorussian State University Minsk
41. A. Kondyurin, and M. Bilek Ion Beam Treatment of Polymers 2008 Elsevier Oxford pp 328
42. A. Kondyurin, B.K. Gan, M.M.M. Bilek, K. Mizuno, and D.R. McKenzie Etching and structural changes of polystyrene films during plasma immersion ion implantation from argon plasma Nuc. Instrum. Meth. Phys. Res. B 251 2006 413 418 (Pubitemid 44498812)
43. A. Kondyurin, B.K. Gan, M.M.M. Bilek, D.R. McKenzie, K. Mizuno, and R. Wuhrer Argon plasma immersion ion implantation of polystyrene films Nuc. Instrum. Meth. Phys. Res. B 266 2008 1074 1084
44. A. Kondyurin, and M. Bilek Etching and structure transformations in uncured epoxy resin under rf-plasma and plasma immersion ion implantation Nuc. Instrum. Meth. Phys. Res. B 268 2010 1568 1580
45. A. Kondyurin, V. Karmanov, R. Guenzel, and Plasma immersion ion implantation of polyethylene Vacuum 64 2002 105 111
46. J.F. Ziegler, and J. Manoyan Nucl. Instrum. Meth. B35 1998 215
47. J.F. Ziegler, and J.P. Biersack The Stopping and Range of Ions in Solid 1985 Pergamon New York p 321
48. B.K. Gan, A. Kondyurin, and M.M.M. Bilek Comparison of protein surface attachment on untreated and plasma immersion ion implantation treated polystyrene, protein islands and carpet Langmuir 23 2007 2741 2746 (Pubitemid 46394402)
49. N.J. Nosworthy, J.P.Y. Ho, A. Kondyurin, D.R. McKenzie, and M.M.M. Bilek The attachment of catalase and poly-L-lysine to plasma immersion ion implantation-treated polyethylene Acta Biomater. 3 2007 695 704 (Pubitemid 47209508)
50. A. Kondyurin, N.J. Nosworthy, and M.M.M. Bilek Attachment of horseradish peroxidase to polytetrafluorethylene (teflon) after plasma immersion ion implantation Acta Biomater. 4 2008 1218 1225
51. B. Ranby, and J.F. Rabek Photodegradation, Photooxidation and Photostabilization of Polymers 1975 John Wiley & Sons London
52. V.N. Popok, I.I. Azarko, V.B. Odzhaev, A. Toth, and R.I. Khaibullin High fluence ion beam modification of polymer surfaces: EPR and XPS studies Nuc. Instrum. Meth. Phys. Res. B 178 2001 305 310 (Pubitemid 32513677)
53. Y. Koval Mechanism of etching and surface relief development of PMMA under low-energy ion bombardment J. Vac. Sci. Technol. B 22 2 2004 843 851