Refractive index depth profile in PMMA due to proton irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 260, Issue 1, 2007, Pages 400-404

  Rajta, I ^a   Szilasi, S Z ^a   Budai, J ^b   Toth Z ^c   Petrik, P ^d   Baradacs E ^e  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b UNIVERSITY OF SZEGED   (Hungary)

^c RESEARCH GROUP ON LASER PHYSICS   (Hungary)

^d RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^e UNIVERSITY OF DEBRECEN   (Hungary)

Author keywords

PMMA; Proton Beam Micromachining (PBM); Proton Beam Writing (PBW); Refractive index depth profile

Indexed keywords

APPROXIMATION THEORY; DEPTH PROFILING; MICROMACHINING; PROTON BEAMS; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY;

PROTON BEAM MICROMACHINING (PBM); PROTON BEAM WRITING (PBW); REFRACTIVE INDEX DEPTH PROFILES;

POLYMETHYL METHACRYLATES;

EID: 34249987667     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.02.052     Document Type: Article

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