Phase formation and morphology control of niobium oxide nanopillars

Materials Science and Engineering: B

Volumn 176, Issue 8, 2011, Pages 626-632

  Tucker, Ryan T ^a   Fleischauer, Michael D ^b   Shewchuk, Ryan M ^a   Schoeller, Andrea E ^b   Brett, Michael J ^a,b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Glancing angle deposition; Nanostructured thin film; Niobium nitride; Niobium oxide; Phase formation

Indexed keywords

AMORPHOUS FILMS; ANNEALING; DEPOSITION; FLOW OF GASES; METALS; MORPHOLOGY; NANOSTRUCTURES; OXIDE FILMS; OXYGEN; STOICHIOMETRY; THIN FILMS;

FORMATION CONTROL; FORMING GAS; GLANCING ANGLE DEPOSITION; HIGH SURFACE AREA; MORPHOLOGY CONTROL; NANOPILLAR; NANOSTRUCTURED THIN FILM; PHASE FORMATIONS; PHASE MORPHOLOGY; PHASE-CONTROL;

NIOBIUM OXIDE;

EID: 79955061875     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2011.02.005     Document Type: Article

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