Ozone sensing properties of NbO2 thin films for health and safety applications

2008 IEEE Sensors Applications Symposium, SAS-2008 - Proceedings

Volumn , Issue , 2008, Pages 187-192

  Arshak, Khalil ^a   Hickey, Ger ^a   Harris, John ^a   Forde, Ed ^a  

^a UNIVERSITY OF LIMERICK   (Ireland)

Author keywords

Gas sensor; Niobium oxide; Ozone; Thin film; Vacuum thermal evaporation

Indexed keywords

ALUMINA; ALUMINUM OXIDE; CHEMICAL SENSORS; ENERGY GAP; NIOBIUM OXIDE; OPTICAL PROPERTIES; OZONE; OZONE LAYER; SUBSTRATES; THERMAL EVAPORATION; VACUUM EVAPORATION;

ELECTRICAL RESPONSE; GLASS SUBSTRATES; HEALTH AND SAFETY; INTER-DIGITATED ELECTRODES; OZONE CONCENTRATION; SENSING PROPERTY; UV-VISIBLE SPECTROPHOTOMETER; VACUUM THERMAL EVAPORATION;

THIN FILMS;

EID: 78649731670     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/sas13374.2008.4472968     Document Type: Conference Paper

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