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Journal of Vacuum Science and Technology B

Volumn 29, Issue 2, 2011, Pages

Fabrication of cone-shaped subwavelength structures by utilizing a confined convective self-assembly technique and inductively coupled-plasma reactive-ion etching

(3) Kim, Dae Seon a Park, Min Su a Jang, Jae Hyung a

a Gwangju Institute of Science and Technology (GIST) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; FABRICATION; GALLIUM ARSENIDE; III-V SEMICONDUCTORS; REACTIVE ION ETCHING; REFLECTION; SELF ASSEMBLY; SEMICONDUCTING GALLIUM;

CONVECTIVE SELF-ASSEMBLY; GAAS SUBSTRATES; INCIDENCE ANGLES; INDUCTIVELY COUPLED-PLASMA REACTIVE ION ETCHING; NORMAL INCIDENCE; PATTERN TRANSFERS; SPECTRAL RANGE; SUB-WAVELENGTH STRUCTURES;

INDUCTIVELY COUPLED PLASMA;

EID: 79953801630 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3556962 Document Type: Article

Times cited : (12)

References (26)

1
- 0029244349
- 0740-3232, 10.1364/JOSAA.12.000333
- E. B. Grann, M. G. Moharam, and D. A. Pommet, J. Opt. Soc. Am. A 0740-3232 12, 333 (1995). 10.1364/JOSAA.12.000333
- (1995) J. Opt. Soc. Am. A , vol.12 , pp. 333
- Grann, E.B.¹ Moharam, M.G.² Pommet, D.A.³

2
- 23144436827
- 0146-9592, 10.1364/OL.30.001885
- Y. Zhao, J. Wang, and G. Mao, Opt. Lett. 0146-9592 30, 1885 (2005). 10.1364/OL.30.001885
- (2005) Opt. Lett. , vol.30 , pp. 1885
- Zhao, Y.¹ Wang, J.² Mao, G.³

3
- 39349087173
- Broadband moth-eye antireflection coatings on silicon
- DOI 10.1063/1.2870080
- C. H. Sun, P. Jiang, and B. Jiang, Appl. Phys. Lett. 0003-6951 92, 061112 (2008). 10.1063/1.2870080 (Pubitemid 351263783)
- (2008) Applied Physics Letters , vol.92 , Issue.6 , pp. 061112
- Sun, C.-H.¹ Jiang, P.² Jiang, B.³

4
- 34547850255
- Wide-angle antireflection effect of subwavelength structures for solar cells
- DOI 10.1143/JJAP.46.3333
- H. Sai, H. Fujii, K. Arafune, Y. Ohshita, Y. Kanamori, H. Yugami, and M. Yamaguchi, Jpn. J. Appl. Phys., Part 1 0021-4922 46, 3333 (2007). 10.1143/JJAP.46.3333 (Pubitemid 47245440)
- (2007) Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers , vol.46 , Issue.A6 , pp. 3333-3336
- Sai, H.¹ Fujii, H.² Arafune, K.³ Ohshita, Y.⁴ Kanamori, Y.⁵ Yugami, H.⁶ Yamaguchi, M.⁷

5
- 65149106441
- 1094-4087, 10.1364/OE.17.006519
- T. H. Chang, P. H. Wu, S. H. Chen, C. H. Chan, C. C. Lee, C. C. Chen, and Y. K. Su, Opt. Express 1094-4087 17, 6519 (2009). 10.1364/OE.17.006519
- (2009) Opt. Express , vol.17 , pp. 6519
- Chang, T.H.¹ Wu, P.H.² Chen, S.H.³ Chan, C.H.⁴ Lee, C.C.⁵ Chen, C.C.⁶ Su, Y.K.⁷

6
- 0036614001
- 0021-4922, 10.1143/JJAP.41.4346
- M. Ishimori, Y. Kanamori, M. Sasaki, and K. Hane, Jpn. J. Appl. Phys., Part 1 0021-4922 41, 4346 (2002). 10.1143/JJAP.41.4346
- (2002) Jpn. J. Appl. Phys., Part 1 , vol.41 , pp. 4346
- Ishimori, M.¹ Kanamori, Y.² Sasaki, M.³ Hane, K.⁴

7
- 0942300038
- 1071-1023, 10.1116/1.1619958
- Z. N. Yu, H. Gao, W. Wu, H. X. Ge, and S. Y. Chou, J. Vac. Sci. Technol. B 1071-1023 21, 2874 (2003). 10.1116/1.1619958
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 2874
- Yu, Z.N.¹ Gao, H.² Wu, W.³ Ge, H.X.⁴ Chou, S.Y.⁵

8
- 14944383747
- Fabrication of subwavelength aluminum wire grating using nanoimprint lithography and reactive ion etching
- DOI 10.1016/j.mee.2004.12.040, PII S0167931704005763, Proceedings of the 30th International Conference on Micro- and Nano-Engineering
- S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Kim, S. H. Lee, J. D. Park, and P. W. Yoon, Microelectron. Eng. 0167-9317 78-79, 314 (2005). 10.1016/j.mee.2004. 12.040 (Pubitemid 40370978)
- (2005) Microelectronic Engineering , vol.78-79 , Issue.1-4 , pp. 314-318
- Ahn, S.-W.¹ Lee, K.-D.² Kim, J.-S.³ Kim, S.H.⁴ Lee, S.H.⁵ Park, J.-D.⁶ Yoon, P.-W.⁷

9
- 67649379403
- 0146-9592, 10.1364/OL.34.001702
- Y. M. Song, S. Y. Bae, J. S. Yu, and Y. T. Lee, Opt. Lett. 0146-9592 34, 1702 (2009). 10.1364/OL.34.001702
- (2009) Opt. Lett. , vol.34 , pp. 1702
- Song, Y.M.¹ Bae, S.Y.² Yu, J.S.³ Lee, Y.T.⁴

10
- 33645340059
- 1464-4258, 10.1088/1464-4258/8/4/S22
- J. C. Martinez-Anton, J. Opt. A, Pure Appl. Opt. 1464-4258 8, S213 (2006). 10.1088/1464-4258/8/4/S22
- (2006) J. Opt. A, Pure Appl. Opt. , vol.8
- Martinez-Anton, J.C.¹

11
- 0001149196
- 0897-4756, 10.1021/cm960006g
- Y. Tian and J. H. Fendler, Chem. Mater. 0897-4756 8, 969 (1996). 10.1021/cm960006g
- (1996) Chem. Mater. , vol.8 , pp. 969
- Tian, Y.¹ Fendler, J.H.²

12
- 0032002521
- 0022-3654, 10.1021/jp973046w
- T. Nakanishi, B. Ohtani, and K. Uosaki, J. Phys. Chem. 0022-3654 102, 1571 (1998). 10.1021/jp973046w
- (1998) J. Phys. Chem. , vol.102 , pp. 1571
- Nakanishi, T.¹ Ohtani, B.² Uosaki, K.³

13
- 0032511370
- Layer-by-layer assembly of thin film zener diodes from conducting polymers and CdSe nanoparticles
- DOI 10.1021/ja9806027
- T. Cassagneau, T. E. Mallouk, and J. H. Fendler, J. Am. Chem. Soc. 0002-7863 120, 7848 (1998). 10.1021/ja9806027 (Pubitemid 28392067)
- (1998) Journal of the American Chemical Society , vol.120 , Issue.31 , pp. 7848-7859
- Cassagneau, T.¹ Mallouk, T.E.² Fendler, J.H.³

14
- 0001221422
- 0022-3654, 10.1021/jp983478m
- T. Teranishi, M. Hosoe, T. Tanaka, and M. Miyake, J. Phys. Chem. 0022-3654 103, 3818 (1999). 10.1021/jp983478m
- (1999) J. Phys. Chem. , vol.103 , pp. 3818
- Teranishi, T.¹ Hosoe, M.² Tanaka, T.³ Miyake, M.⁴

15
- 0033743114
- 0743-7463, 10.1021/la9908283
- L. Motte, E. Lacaze, M. Maillard, and M. P. Pileni, Langmuir 0743-7463 16, 3803 (2000). 10.1021/la9908283
- (2000) Langmuir , vol.16 , pp. 3803
- Motte, L.¹ Lacaze, E.² Maillard, M.³ Pileni, M.P.⁴

16
- 0031269615
- 0003-6951, 10.1063/1.120220
- C. Haginoya, M. Ishibashi, and K. Koike, Appl. Phys. Lett. 0003-6951 71, 2934 (1997). 10.1063/1.120220
- (1997) Appl. Phys. Lett. , vol.71 , pp. 2934
- Haginoya, C.¹ Ishibashi, M.² Koike, K.³

17
- 33644887719
- 1613-6810, 10.1002/smll.200500390
- S. M. Yang, S. G. Jang, D. G. Choi, S. Kim, and H. K. Yu, Small 1613-6810 2, 458 (2006). 10.1002/smll.200500390
- (2006) Small , vol.2 , pp. 458
- Yang, S.M.¹ Jang, S.G.² Choi, D.G.³ Kim, S.⁴ Yu, H.K.⁵

18
- 23744434507
- Rapid fabrication of two- and three-dimensional colloidal crystal films via confined convective assembly
- DOI 10.1002/adfm.200400602
- M. H. Kim, S. H. Im, and O. O. Park, Adv. Funct. Mater. 1616-301X 15, 1329 (2005). 10.1002/adfm.200400602 (Pubitemid 41119977)
- (2005) Advanced Functional Materials , vol.15 , Issue.8 , pp. 1329-1335
- Kim, M.H.¹ Im, S.H.² Park, O.O.³

19
- 77957009361
- 1094-4087, 10.1364/OE.18.00A308
- M. Y. Chiu, C. H. Chang, M. A. Tsai, F. Y. Chang, and P. Yu, Opt. Express 1094-4087 18, A308 (2010). 10.1364/OE.18.00A308
- (2010) Opt. Express , vol.18 , pp. 308
- Chiu, M.Y.¹ Chang, C.H.² Tsai, M.A.³ Chang, F.Y.⁴ Yu, P.⁵

20
- 35948961599
- Using colloidal lithography to fabricate and optimize sub-wavelength pyramidal and honeycomb structures in solar cells
- DOI 10.1364/OE.15.014793
- H. L. Chen, S. Y. Chuang, C. H. Lin, and Y. H. Lin, Opt. Express 1094-4087 15, 14793 (2007). 10.1364/OE.15.014793 (Pubitemid 350072019)
- (2007) Optics Express , vol.15 , Issue.22 , pp. 14793-14803
- Chen, H.L.¹ Chuang, S.Y.² Lin, C.H.³ Lin, Y.H.⁴

21
- 50249086870
- 0927-0248, 10.1016/j.solmat.2008.05.014
- M. J. Huang, C. R. Yang, Y. C. Chiou, and R. T. Lee, Sol. Energy Mater. Sol. Cells 0927-0248 92, 1352 (2008). 10.1016/j.solmat.2008.05.014
- (2008) Sol. Energy Mater. Sol. Cells , vol.92 , pp. 1352
- Huang, M.J.¹ Yang, C.R.² Chiou, Y.C.³ Lee, R.T.⁴

22
- 0036303313
- 0003-6935, 10.1364/AO.41.000902
- M. Karlsson and F. Nikolajeff, Appl. Opt. 0003-6935 41, 902 (2002). 10.1364/AO.41.000902
- (2002) Appl. Opt. , vol.41 , pp. 902
- Karlsson, M.¹ Nikolajeff, F.²

23
- 69949135990
- 0003-6935, 10.1364/AO.32.001154
- D. H. Raguin and G. M. Morris, Appl. Opt. 0003-6935 32, 1154 (1993). 10.1364/AO.32.001154
- (1993) Appl. Opt. , vol.32 , pp. 1154
- Raguin, D.H.¹ Morris, G.M.²

24
- 2442490755
- Optical elements with subwavelength structured surfaces
- DOI 10.1007/s10043-003-0063-2
- H. Kikuta, H. Toyota, and W. Yu, Opt. Rev. 1340-6000 10, 63 (2003). 10.1007/s10043-003-0063-2 (Pubitemid 36814619)
- (2003) Optical Review , vol.10 , Issue.2 , pp. 63-73
- Kikuta, H.¹ Toyota, H.² Yu, W.³

25
- 61749103132
- 1530-6984, 10.1021/nl802886y
- J. Zhu, Nano Lett. 1530-6984 9, 279 (2009). 10.1021/nl802886y
- (2009) Nano Lett. , vol.9 , pp. 279
- Zhu, J.¹

26
- 36849015423
- Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures
- DOI 10.1038/nnano.2007.389, PII NNANO2007389
- Y. F. Huang, Nat. Nanotechnol. 1748-3387 2, 770 (2007). 10.1038/nnano.2007.389 (Pubitemid 350223350)
- (2007) Nature Nanotechnology , vol.2 , Issue.12 , pp. 770-774
- Huang, Y.-F.¹ Chattopadhyay, S.² Jen, Y.-J.³ Peng, C.-Y.⁴ Liu, T.-A.⁵ Hsu, Y.-K.⁶ Pan, C.-L.⁷ Lo, H.-C.⁸ Hsu, C.-H.⁹ Chang, Y.-H.¹⁰ Lee, C.-S.¹¹ Chen, K.-H.¹² Chen, L.-C.¹³

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