Closely packed and aspect-ratio-controlled antireflection subwavelength gratings on GaAs using a lenslike shape transfer

Optics Letters

Volumn 34, Issue 11, 2009, Pages 1702-1704

  Song, Young Min ^a   Bae, Si Young ^a   Yu, Jae Su ^b   Lee, Yong Tak ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM ARSENIDE; LITHOGRAPHY; OPTICAL BEAM SPLITTERS; PHOTORESISTS; SEMICONDUCTING GALLIUM;

ASPECT-RATIO CONTROLLED; HOLOGRAPHIC LITHOGRAPHY; LOW COST FABRICATION; REFLECTION PROPERTIES; RIGOROUS COUPLED WAVE ANALYSIS; SUBWAVELENGTH GRATING; THERMAL REFLOW PROCESS; WIDE SPECTRAL RANGE;

ASPECT RATIO;

EID: 67649379403     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.34.001702     Document Type: Article

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