Self-formation of sub-60-nm half-pitch gratings with large areas through fracturing

Nature Nanotechnology

Volumn 2, Issue 9, 2007, Pages 545-548

  Pease III, Leonard F ^a   Deshpande, Paru ^a   Wang, Ying ^a   Russel, William B ^a   Chou, Stephen Y ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL MATERIALS; ELECTROHYDRODYNAMICS; NANOIMPRINT LITHOGRAPHY; NANOLITHOGRAPHY; PHOTOLITHOGRAPHY; THIN FILMS;

CHEMICAL AND BIOLOGICALS; CHEMICAL COMPOSITIONS; COMPLEMENTARY SETS; ELECTROHYDRODYNAMIC INSTABILITY; HALF-PITCH GRATINGS; INTERFERENCE LITHOGRAPHY; MICRO AND NANOSTRUCTURES; POLYMER THIN FILMS;

FRACTURE;

ARTICLE; CHEMICAL COMPOSITION; FILM; GRATING; MOLECULAR WEIGHT; PRIORITY JOURNAL;

EID: 34548424161     PISSN: 17483387     EISSN: 17483395     Source Type: Journal    
DOI: 10.1038/nnano.2007.264     Document Type: Article

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