Design and UV-LIGA microfabrication of an electro-statically actuated power relay

Microsystem Technologies

Volumn 13, Issue 3-4, 2007, Pages 279-286

  Jeong, S J ^a   Wang, W ^a  

^a Louisiana State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRIC INSULATORS; ELECTROSTATIC ACTUATORS; FABRICATION; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE;

ELECTROSTATIC ACTUATION; MECHANICAL CONNECTORS; POWER RELAY;

ELECTRIC RELAYS;

EID: 33845750187     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0171-6     Document Type: Article

References (8)

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3. Hashimoto E et al (1995) Thermally controlled magnetization microrelay. Transducer '95, Eurosensors IX, vol 1. p 364, 25-29 June 1995
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8. Yao JJ, Chang MF (1995) A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHZ. Transducer '95, Eurosensors IX, vol 2. pp 384-387, 25-29 June 1995