A Six-Phase Multilevel Inverter for MEMS Electrostatic Induction Micromotors

IEEE Transactions on Circuits and Systems II: Express Briefs

Volumn 51, Issue 2, 2004, Pages 49-56

  Neugebauer, Timothy C ^a   Perreault, David J ^a   Lang, Jeffrey H ^a   Livermore, Carol ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electric induction motors; electrostatic micro motors; microelectromechanical systems (MEMS); multilevel inverter; power electronics

Indexed keywords

CONTROL SYSTEM SYNTHESIS; ELECTRIC INVERTERS; ELECTRIC NETWORK TOPOLOGY; ELECTRIC POTENTIAL; ELECTROSTATICS; INDUCTION MOTORS; MICROELECTROMECHANICAL DEVICES; POWER CONVERTERS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; TIMING CIRCUITS; ACTUATORS; ELECTRIC FIELD EFFECTS; ELECTRIC INDUCTORS; ELECTRIC MACHINERY; ELECTRIC TRANSFORMERS; LITHOGRAPHY; MAGNETIZATION; POWER ELECTRONICS;

ELECTROSTATIC INDUCTION MICROMOTORS; INVERTER TOPOLOGIES; OPERATING REQUIREMENTS; SIX PHASE MULTILEVEL INVERTER; TIMING CONSTRAINTS;

POWER ELECTRONICS; ELECTRIC INVERTERS;

ELECTRIC INDUCTION MOTORS; ELECTROSTATIC MICROMOTORS; MULTILEVEL INVERTERS;

EID: 4544300452     PISSN: 15497747     EISSN: 15583791     Source Type: Journal    
DOI: 10.1109/TCSII.2003.822419     Document Type: Article

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