Micromachines: Principles of operation, dynamics, and control

2005 IEEE International Conference on Electric Machines and Drives

Volumn , Issue , 2005, Pages 1108-1115

  Irudayaraj, Sujay S ^a   Emadi, Ali ^a  

^a ILLINOIS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMICS; ELECTROMAGNETIC FIELDS; ELECTROSTATICS; FABRICATION; MOTORS; PROCESS CONTROL; TRANSIENTS;

ELECTROSTATIC MACHINES; GEOMETRICAL CONSTRUCTION; MAGNETIC MICROMACHINES; MICRO ELECTRIC MACHINERY;

MICROMACHINING;

EID: 33749052514     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/iemdc.2005.195860     Document Type: Conference Paper

References (15)

1. D.M. Taylor, and P.E. Seeker, Industrial electrostatics-fundamentals and measurements, Research Studies Press, 1994, pp. 16-66.
2. Y.C. Tai, L.S. Fan, R.S. Muller, "IC-processed micro-motors: design, technology, and testing," in Proc. IEEE Micro Electro Mechanical Systems, pp. 1-6, Feb. 1989.
3. rd Annual Power Electronics Specialists Conference, vol. 2, pp. 695-700, June 2002.
4. W. Trimmer, and R. Jebens, "An operational harmonic electrostatic motor," in Proc. IEEE Micro Electro Mechanical Systems, pp. 13-16, Feb. 1989.
5. S.C. Jacobsen, R.H. Price, J.E. Wood, T.H. Rytting, and M. Rafaelof, "The wobble Motor: an electrostatic planetary-armature, microactuator," in Proc. IEEE Micro Electro Mechanical Systems, pp. 17-24, Feb. 1989.
6. M. Mehregany, S.M. Phillips, E.T. Hsu, and J.H.Lang, "Operation of harmonic side-drive micromotors studied through gear ratio measurements," in Proc. IEEE International Conference on Solid-State Sensors and Actuators, pp. 59-62, June 1991.
7. Stephen F. Bart, and Jeffrey H. Lang, "Electroquasistatic induction micromotors," in Proc. IEEE Micro Electro Mechanical Systems, pp. 7-12, Feb. 1989.
8. Masood Tabib-Azar, Microactuators: electrical, magnetic, thermal, optical, mechanical, chemical and smart structures, Kluwer Academic Publishers, 1998, pp. 37-86.
9. J.W. Judy, R.S. Muller, H.H. Zappe, "Magnetic microactuation of polysilicon flexure structures," Journal of Microelectromechanical Systems, vol. 4, no. 4, pp. 162-169, Dec. 1995.
10. O. Cugat, J. Delamare, and G. Reyne, "Magnetic micro-actuators and systems (MAGMAS)," IEEE Transactions on Magnetics, vol. 39, no. 6, pp.3607-3612, Nov. 2003.
11. B. Wagner, M. Kreutzer, and W. Benecke, "Permanent magnet micromotors on silicon substrates," IEEE Transactions on Microelectromechanical Systems, vol. 2, no. 1, pp. 23-29, March 1993.
12. M. Mehregany, S.D. Senturia, J.H. Lang, "Micromotor fabrication," IEEE Transactions on Electron Devices, vol. 39, no. 9, pp. 2060-2069, Sept 1992.
13. Y.C. Tai, and R.S. Muller, "Factional study of IC-processed micromotors," Sensors and Actuators, vol. A21, pp. 180-183, 1990.
14. Stephen F. Bart, M. Mehregany, Lee S. Tavrow, Jeffrey H. Lang, and Stephen D. Senturia, "Electric Micromotor Dynamics," IEEE Transactions on Electron Devices, vol. 39, no. 3, pp. 566-575, March 1992.
15. th Annual Conference on Industrial Electronics, Vol. 1, pp. 347-352, Nov. 2003.