A new FEM approach for field and torque simulation of electrostatic microactuators

Journal of Microelectromechanical Systems

Volumn 11, Issue 4, 2002, Pages 362-371

  Delfino, Federico ^a   Rossi, Mansueto ^a  

^a UNIVERSITY OF GENOA   (Italy)

Author keywords

Computer aided design (CAD); Electrostatic actuation; Finite element method (FEM); Floating conductor; Torque computation

Indexed keywords

COMPUTATION THEORY; COMPUTER AIDED DESIGN; FINITE ELEMENT METHOD; MAGNETOELECTRIC EFFECTS; ROTORS; TORQUE;

ELECTROSTATIC MICROACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 0036687723     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.800931     Document Type: Article

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