Analysis and optimization of MEMS electrostatic microactuator

Proceeding of the 3rd International Conference of Young Scientists "Perspective Technologies and Methods in MEMS Design", MEMSTECH 2007

Volumn , Issue , 2007, Pages 20-25

  Behjat, Vahid ^a   Vahedi, A ^b  

^a IRAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Iran)

^b NONE

Author keywords

Driving torque; Field analysis; Finite element method; MEMS electrostatic microactuator; Optimization

Indexed keywords

ACTUATORS; DENTISTRY; DESIGN; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; PAPER; STEPPING MOTORS; STRUCTURAL OPTIMIZATION; TORQUE;

DESIGN STAGES; DRIVING TORQUE; ELECTROSTATIC MICROMOTORS; FIELD ANALYSIS; GEOMETRIC PARAMETERS; GEOMETRIC STRUCTURES; OPTIMAL EXCITATIONS; OPTIMAL VALUES; ROTOR TOOTH; STATOR TOOTH; SUCCESSIVE SAMPLINGS; TORQUE RIPPLES; TWO STAGES; VARIABLE CAPACITANCES;

FINITE ELEMENT METHOD;

EID: 47849131974     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSTECH.2007.4283417     Document Type: Conference Paper

References (17)

1. U. Beerschwinger, N.G. Milnes, .J .Yang, R.L. Reuben, A.J. Sangster, and H. Ziad, "Coupled Electrostatic and Mechanical FEA of a Micromotor", Journal of Microelectromecahnical System, Vol. 3, No. 4, pp.162-171, December 1994.
2. Wang Xinli, Cui Shumei, Cheng Shukang, "Advantages of Electrostatic Micromotors and Its Application to Medical Instruments", IEEE, 2002.
3. Yu-Chong Tai, "Micromotors", IEEE Conference, pp.8-11, May 1995.
4. th International conference, MEMS 2001, Jan. 2001, Interlaken, Switzerland.
5. Hiroyuki Fujita, "Microactuators and Micromachines", Proceeding of the IEEE, Vol.86, No.8, pp.1721-1731, August 1998.
6. Bart, S.F., Mehregany, M., Tavrow, L.S., Lang, J.H., and Senturia, S.D., "Electric Micromotor Dynamics" 1992, IEEE Trans. On Electron Devices, 39,3, 566-575
7. Mehran Mehregany, Stephen D. Senturia, Jeffery H. Lang, "Measurement of Wear in Polysilicon Micromotors" IEEE Transactions on Electron Devices, Vol. 39, No. 5, May 1992. pp. 1136-1143
8. N G Milne, S J E Yang, A J Sangster, H Ziad, S Spirkovitch, "Determination of the Forces Present in an Electrostatic micromotor".
9. P.L. Chapman, P.T. Kerin, "Micromotor Technology: Electric Drive Designer's Perspective", IEEE 2001, pp. 1978-1983.
10. Al Wallash, Larry Levit, "Electrical Breakdown and ESD phenomena for devices with nanometer-to-micron gaps"
11. J. Mohr, C. Burbaum, P. Bley, W.Menz, U.Wallrabe, "Movable microstructures manufactured by the LIGA process as basic elements for microsystems", Proc. Micro System Technology, Berlin, September 10-13, 1990, Springer Verlag, pp.529-537.
12. K.Hameyer, R.Belmans, "Design of very Small Electromagnetic and Electrostatic Micromotors", IEEE Trans. Energy Conversion, Vol.14, p.1241-1246, Dec. 1999.
13. S.Wiak, P. Di Barba and A. Savini, "3-D Computer Aided Analysis of the "Berely" Electrostatic Micromotor", IEEE Transactions on Magnetics, Vol. 31, No. 3, pp.2108-2111, May 1995.
14. P. Di Barba, A. Savini, S. Wiak, "2-D Numerical Simulation of Electrostatic Micromotor Torque", Proc. 2nd. Intl. Conf. on Computation in Electromagnetics, p.277-230, April 1994.
15. V.Behjat, A. Vahedi, B.Hashemi, "Analysis of Electrostatic Synchronous Micromotors Using Finite Element Method", ACEMP conference, pp.312-315,May 2004, Istanbul, Turkey.
16. Long-Sheng Fan, Yu-Chung Tai, Richard S. Muller, "IC-Processed Electrostatic Micro-motors", Sensors and Actuators, pp.41-47, 1989.
17. T.B. Johansson, M. Van Dessel, R.Belmans, W. Geysen, R.Hanitsch, "Design and Optimization of Electrostatic Micromotors", IEEE, 1993.