Diamond-like carbon deposited by plasma technique as a function of methane flow rate

Diamond and Related Materials

Volumn 19, Issue 7-9, 2010, Pages 756-759

  Viana, G A ^a   Motta, E F ^a   Da Costa, M E H M ^b   Freire Jr , F L ^b   Marques, F C ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

^b PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO   (Brazil)

Author keywords

Amorphous carbon films; Cannabis; Diamond Like Carbon; Plasma enhanced chemical vapor deposition

Indexed keywords

CHEMICAL VAPOR; DIAMOND-LIKE CARBON; HYDROGEN CONCENTRATION; METHANE FLOW; METHANE GAS; OPTICAL GAP; RAMAN SPECTROSCOPE; REACTOR CHAMBER; REACTOR WALLS; ZERO FLOW;

AERODYNAMICS; AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; DEPOSITION; DEPOSITION RATES; DIAMONDS; FLOW OF GASES; METHANATION; METHANE; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; VAPOR DEPOSITION;

DIAMOND LIKE CARBON FILMS;

EID: 77955230234     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2010.01.043     Document Type: Article

References (19)

1. S. Neuville, and A. Matthews MRS Bull. 22 1997 22
2. C.H.P. Poa, S.R.P. Silva, R.G. Lacerda, G.A.J. Amaratunga, W.I. Milne, and F.C. Marques Appl. Phys. Lett. 86 2005 232102
3. G.A.J. Amaratunga, and S.R.P. Silva Appl. Phys. Lett. 68 1996 2529
4. J. Robertson Mat. Sci. Eng. R 37 2002 129
5. Y. Lifshiz Diamond Relat. Mater. 8 1999 1659
6. F.C. Marques, R.G. Lacerda, A. Champi, V. Stolojan, D.C. Cox, and S.R.P. Silva Appl. Phys. Lett. 83 15 2003 3099
7. S.R.P. Silva, Properties of Amorphous Carbon, EMIS Datareviews Series No. 29, INSPEC - IEE, London, United Kingdom, 2003.
8. D.R. MacKenzie, D. Muller, and B.A. Pailthorpe Phys. Rev. Lett. 67 1991 773
9. R.G. Lacerda, and F.C. Marques Appl. Phys. Lett. 73 1998 617
10. K. Okano, S. Koizumi, S.R.P. Silva, and G.A.J. Amaratunga Nature 381 1996 140
11. M.W. Géis, N.N. Efremow, K.E. Krohn, J.C. Twichell, and T.M. Lyszcazrz Nature 393 1998 431
12. T. Suzuki, and H. Kodama Diam. Relat. Mater. 18 2009 990
13. I. Chambouleyron, S.D. Ventura, E.G. Birgin, and J.M. Martínez J. Appl. Phys. 92 2002 3093
14. D.K. Basa, and F.W. Smith Thin Solid Films 192 1990 121
15. J. Ristein, R.T. Stief, L. Ley, and W. Beyer J. Appl. Phys. 84 7 1998 3836
16. W. Zhang, and Y. Catherine Surf. Coat. Techn. 47 1991 69
17. A.C. Ferrari, and J. Robertson Phys. Rev. B 61 20 2000 14095
18. C. Casiraghi, A.C. Ferrari, and J. Robertson Phys. Rev. B 72 2005 085401
19. J. Robertson Phys. Rev. B 53 1996 16302