Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8

Journal of Micromechanics and Microengineering

Volumn 21, Issue 4, 2011, Pages

  Marelli, Mattia ^a,c   Divitini, Giorgio ^a,d   Collini, Cristian ^b   Ravagnan, Luca ^a   Corbelli, Gabriele ^a   Ghisleri, Cristian ^a   Gianfelice, Antonella ^a,e   Lenardi, Cristina ^a   Milani, Paolo ^a   Lorenzelli, Leandro ^b  

^a UNIVERSITY OF MILAN   (Italy)

^b ITC IRST   (Italy)

^c EPFL   (Switzerland)

^d UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^e UNIVERSITY OF OTAGO   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION LAYER; ELECTRICAL CONDUCTION; ELECTRICALLY CONDUCTIVE; FLEXIBLE MICROELECTRODE ARRAYS; GASPHASE; LIFT-OFF TECHNOLOGY; METAL POLYMERS; METALLIC NANOPARTICLES; METALLIZATIONS; MICRO DEVICES; MICROELECTRODE ARRAY; MICROPATTERNS; NANO-COMPOSITE LAYERS; NEURONAL CELL; SUPERSONIC CLUSTER BEAM DEPOSITION; THIN LAYERS;

ADHESION; BIOCOMPATIBILITY; CELL CULTURE; CHEMICAL MODIFICATION; GROWTH KINETICS; MICROELECTRODES; NANOPARTICLES;

NANOCOMPOSITES;

EID: 79953660777     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/4/045013     Document Type: Article

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