Insight into on-wafer crystallization of pure-silica-zeolite films through nutrient replenishment

Langmuir

Volumn 27, Issue 7, 2011, Pages 3283-3285

  Yan, Yushan ^a   Lew, Christopher M ^a   Liu, Yan ^a   Kisailus, David ^a   Kloster, Grant M ^b   Chow, Gabriel ^c   Boyanov, Boyan ^b   Sun, Minwei ^a   Wang, Junlan ^c  

^a University of California Riverside ^*  (United States)

^b INTEL CORPORATION   (United States)

^c University of Washington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE DOMAINS; ELLIPSOMETRIC POROSIMETRY; FILM MICROSTRUCTURES; LOW DIELECTRIC CONSTANTS; MEAN PORE SIZE; MESOPORE SIZES; NANOPARTICLE SUSPENSION; ON-WAFER; PURE SILICA ZEOLITES; REDUCED MODULUS; SPIN-ON; TEM; TETRAETHYL ORTHOSILICATES;

CRYSTAL MICROSTRUCTURE; DIELECTRIC MATERIALS; NANOINDENTATION; SILICA; SIZE DISTRIBUTION; TRANSMISSION ELECTRON MICROSCOPY;

PORE SIZE;

EID: 79953251289     PISSN: 07437463     EISSN: 15205827     Source Type: Journal    
DOI: 10.1021/la200603z     Document Type: Article

References (17)

1. International Technology Roadmap for Semiconductors 2009 Edition-Interconnect. http://www.itrs.net/Links/2009ITRS/2009Chapters- 2009Tables/2009-Interconnect.pdf (September 11, 2010).
2. Dubois, G.; Miller, R. D.; Volksen, W. Spin-on Dielectric Materials. In Dielectric Films for Advanced Microelectronics; Baklanov, M. R., Green, M., Maex, K., Eds.; John Wiley and Sons, Ltd.: West Sussex, Great Britain, 2007; pp 33 - 83.
3. Liu, Y.; Lew, C. M.; Sun, M. W.; Cai, R.; Wang, J. L.; Kloster, G.; Boyanov, B.; Yan, Y. S. Angew. Chem., Int. Ed. 2009, 48, 4777-4780
4. Li, Z. J.; Li, S.; Luo, H. M.; Yan, Y. S. Adv. Funct. Mater. 2004, 14, 1019-1024
5. Wang, Z. B.; Mitra, A. P.; Wang, H. T.; Huang, L. M.; Yan, Y. S. Adv. Mater. 2001, 13, 1463-1466
6. Lew, C. M.; Liu, Y.; Day, B.; Kloster, G. A.; Tiznado, H.; Sun, M. W.; Zaera, F.; Wang, J. L.; Yan, Y. S. Langmuir 2009, 25, 5039-5044
7. Li, Z. J.; Lew, C. M.; Li, S.; Medina, D. I.; Yan, Y. S. J. Phys. Chem. B 2005, 109, 8652-8658
8. Eslava, S.; Baklanov, M. R.; Neimark, A. V.; Iacopi, F.; Kirschhock, C. E. A.; Maex, K.; Martens, J. A. Adv. Mater. 2008, 20, 3110-3116
9. Baerlocher, C.; McCusker, L. B.; Olson, D. H. Atlas of Zeolite Framework Types, sixth revised ed.; Elsevier: Amsterdam, 2007.
10. Liu, Y.; Zhang, W. Z.; Pinnavaia, T. J. J. Am. Chem. Soc. 2000, 122, 8791-8792
11. Liu, Y.; Zhang, W. Z.; Pinnavaia, T. J. Angew. Chem., Int. Ed. 2001, 40, 1255-1258
12. Han, Y.; Wu, S.; Sun, Y. Y.; Li, D. S.; Xiao, F. S.; Liu, J.; Zhang, X. Z. Chem. Mater. 2002, 14, 1144-1148
13. Han, Y.; Xiao, F. S.; Wu, S.; Sun, Y. Y.; Meng, X. J.; Li, D. S.; Lin, S.; Deng, F.; Ai, X. J. J. Phys. Chem. B 2001, 105, 7963-7966
14. Xiao, F. S.; Han, Y.; Yu, Y.; Meng, X. J.; Yang, M.; Wu, S. J. Am. Chem. Soc. 2002, 124, 888-889
15. Zhang, Z. T.; Han, Y.; Zhu, L.; Wang, R. W.; Yu, Y.; Qiu, S. L.; Zhao, D. Y.; Xiao, F. S. Angew. Chem., Int. Ed. 2001, 40, 1258-1262
16. Li, Z. J.; Johnson, M. C.; Sun, M. W.; Ryan, E. T.; Earl, D. J.; Maichen, W.; Martin, J. I.; Li, S.; Lew, C. M.; Wang, J.; Deem, M. W.; Davis, M. E.; Yan, Y. S. Angew. Chem., Int. Ed. 2006, 45, 6329-6332
17. Wang, Z. B.; Wang, H. T.; Mitra, A.; Huang, L. M.; Yan, Y. S. Adv. Mater. 2001, 13, 746-749