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Advanced Materials

Volumn 23, Issue 13, 2011, Pages 1567-1571

Templated solid-state dewetting to controllably produce complex patterns

(2) Ye, Jongpil a Thompson, Carl V a

a Massachusetts Institute of Technology (United States)

Author keywords

dewetting; epitaxy; photolithography; self assembly; thin films

Indexed keywords

COMPLEX PATTERN; COMPLEX STRUCTURE; DE-WETTING; EPITAXY; FEATURE SIZES; PRE-PATTERNING; TEMPLATED;

EPITAXIAL FILMS; EPITAXIAL GROWTH; PHOTOLITHOGRAPHY; SELF ASSEMBLY;

SURFACE PHENOMENA;

MAGNESIUM OXIDE; NICKEL;

ARTICLE; CHEMISTRY; ELECTRICAL EQUIPMENT; WETTABILITY;

ELECTRICAL EQUIPMENT AND SUPPLIES; MAGNESIUM OXIDE; NICKEL; WETTABILITY;

EID: 79953247207 PISSN: 09359648 EISSN: 15214095 Source Type: Journal
DOI: 10.1002/adma.201004095 Document Type: Article

Times cited : (154)

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