Transition from wire formation to island formation in thermal agglomeration of a (111) silicon-on-insulator layer

Thin Solid Films

Volumn 508, Issue 1-2, 2006, Pages 235-238

  Burhanudin, Zainal A ^a   Nuryadi, Ratno ^a   Ishikawa, Yasuhiko ^a   Tabe, Michiharu ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Agglomeration; Si island; Si wire; SOI

Indexed keywords

AGGLOMERATION; ATOMIC FORCE MICROSCOPY; HEAT TREATMENT; SILICON WAFERS; VACUUM;

SI ISLAND; SI WIRE; SOI; STRUCTURAL TRANSITION; WIRE ARRAYS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 33646096000     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.326     Document Type: Article

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