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Volumn 47, Issue 3 PART 1, 2008, Pages 1461-1464

Thermal agglomeration of ultrathin silicon-on-insulator layers: Crystalline orientation dependence

Author keywords

Crystalline orientation dependence; Si agglomeration; Si islands; Si wires; Ultrathin SOI

Indexed keywords

AGGLOMERATION; CRYSTALLINE MATERIALS; MICROSENSORS; WIRE;

EID: 54249091763     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.1461     Document Type: Article
Times cited : (19)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.