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Volumn 47, Issue 3 PART 1, 2008, Pages 1461-1464
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Thermal agglomeration of ultrathin silicon-on-insulator layers: Crystalline orientation dependence
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Author keywords
Crystalline orientation dependence; Si agglomeration; Si islands; Si wires; Ultrathin SOI
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Indexed keywords
AGGLOMERATION;
CRYSTALLINE MATERIALS;
MICROSENSORS;
WIRE;
CRYSTALLINE ORIENTATION DEPENDENCE;
SI AGGLOMERATION;
SI ISLANDS;
SI WIRES;
ULTRATHIN SOI;
SILICON;
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EID: 54249091763
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.1461 Document Type: Article |
Times cited : (19)
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References (18)
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