Nano-strip grating lines self-organized by a high speed scanning CW laser

Nanotechnology

Volumn 22, Issue 17, 2011, Pages

  Kaneko, Satoru ^a,b   Ito, Takeshi ^a   Akiyama, Kensuke ^a   Yasui, Manabu ^a   Kato, Chihiro ^a   Tanaka, Satomi ^a   Hirabayashi, Yasuo ^a   Mastuno, Akira ^c   Nire, Takashi ^c   Funakubo, Hiroshi ^b   Yoshimoto, Mamoru ^b  

^a KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^c Phoeton Corp   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRIC CIRCLES; CONTINUOUS WAVES; CW-LASER; HIGH OUTPUT; HIGH SPEED SCANNING; LASER ANNEALING; LASER POWER; NANOSTRUCTURE FABRICATION; SCANNING LASERS; SCANNING SPEED; SELF-ORGANIZED; SI WAFER; SILICON SUBSTRATES; SIMPLE METHOD; SIMPLE SYSTEM; STRIP GRATING; VERSATILE METHODS;

ELECTRIC RESISTANCE; PERSONAL COMPUTERS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

SCANNING;

EID: 79952927321     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/17/175307     Document Type: Article

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