Fabrication and gas sensing performance of parallel assemblies of metal oxide nanotubes supported by porous aluminum oxide membranes

Sensors and Actuators, B: Chemical

Volumn 136, Issue 1, 2009, Pages 257-264

  Artzi Gerlitz, Reit ^a   Benkstein, Kurt D ^a   Lahr, David L ^a   Hertz, Joshua L ^a   Montgomery, Christopher B ^a   Bonevich, John E ^b   Semancik, Steve ^a   Tarlov, Michael J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Anodized aluminum oxide; Gas sensor; Nanotube; Sol gel; Tungsten oxide

Indexed keywords

ALUMINA; ALUMINUM; CHEMICAL SENSORS; COLLOIDS; ELECTRON TUBES; GAS DETECTORS; GAS SENSING ELECTRODES; GASES; GELATION; GELS; GOLD; LIGHT METALS; METALLIC COMPOUNDS; METHANOL; NITROGEN OXIDES; OXIDES; PHOTOELECTRON SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SENSORS; SOL-GEL PROCESS; SOL-GELS; SOLS; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN; TUNGSTEN COMPOUNDS; X RAY ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ALUMINUM OXIDES; ANALYTE MOLECULES; ANODIZED ALUMINUM OXIDE; CONDUCTOMETRIC; ELECTRICAL CONTACTS; ENHANCED SENSITIVITIES; FILM SENSORS; GAS SENSOR; LARGE SURFACE AREAS; MEMBRANE PORES; METAL CONTACTS; METAL OXIDES; NANOTUBE ASSEMBLIES; NITROGEN DIOXIDES; POROUS ALUMINUM OXIDES; RESISTANCE MEASUREMENTS; SENSING PERFORMANCES; SENSOR ARCHITECTURES; TUNGSTEN OXIDE; TUNGSTEN TRIOXIDES; X-RAY DIFFRACTIONS; X-RAY PHOTOELECTRON SPECTROSCOPIES;

NANOTUBES;

EID: 58249144720     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.10.056     Document Type: Article

References (47)

1. Barsan N., and Weimar U. Conduction model of metal oxide gas sensors. Journal of Electroceramics 7 (2001) 143-167
2. Comini E. Metal oxide nano-crystals for gas sensing. Analytica Chimica Acta 568 (2006) 28-40
3. Xia Y.N., Yang P.D., Sun Y.G., Wu Y.Y., Mayers B., Gates B., Yin Y.D., Kim F., and Yan Y.Q. One-dimensional nanostructures: synthesis, characterization, and applications. Advanced Materials 15 (2003) 353-389
4. Franke M.E., Koplin T.J., and Simon U. Metal and metal oxide nanoparticles in chemiresistors: does the nanoscale matter?. Small 2 (2006) 36-50
5. Benkstein K.D., Martinez C.J., Li G.F., Meier D.C., Montgomery C.B., and Semancik S. Integration of nanostructured materials with MEMS microhotplate platforms to enhance chemical sensor performance. Journal of Nanoparticle Research 8 (2006) 809-822
6. Park C.O., and Akbar S.A. Ceramics for chemical sensing. Journal of Materials Science 38 (2003) 4611-4637
7. 2 nanotube-arrays 20 μm to 222 μm in length. Sensor Letters 4 (2006) 334-339
8. Hoa N.D., Van Quy N., Cho Y., and Kim D. An ammonia gas sensor based on non-catalytically synthesized carbon nanotubes on an anodic aluminum oxide template. Sensors and Actuators, B - Chemical 127 (2007) 447-454
9. 3 nanowire devices. Nano Letters 4 (2004) 1919-1924
10. Novak J.P., Snow E.S., Houser E.J., Park D., Stepnowski J.L., and McGill R.A. Nerve agent detection using networks of single-walled carbon nanotubes. Applied Physics Letters 83 (2003) 4026-4028
11. Cui Y., Wei Q.Q., Park H.K., and Lieber C.M. Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species. Science 293 (2001) 1289-1292
12. Zheng G.F., Patolsky F., Cui Y., Wang W.U., and Lieber C.M. Multiplexed electrical detection of cancer markers with nanowire sensor arrays. Nature Biotechnology 23 (2005) 1294-1301
13. Makaram P., Somu S., Xiong X., Busnaina A., Jung Y.J., and McGruer N. Scalable nanotemplate assisted directed assembly of single walled carbon nanotubes for nanoscale devices. Applied Physics Letters 90 (2007) 243108
14. Smith P.A., Nordquist C.D., Jackson T.N., Mayer T.S., Martin B.R., Mbindyo J., and Mallouk T.E. Electric-field assisted assembly and alignment of metallic nanowires. Applied Physics Letters 77 (2000) 1399-1401
15. Lee S.W., Jeong M.C., Myoung J.M., Chae G.S., and Chung I.J. Magnetic alignment of ZnO nanowires for optoelectronic device applications. Applied Physics Letters 90 (2007) 133115
16. Kim W.H., Park S.J., Son J.Y., and Kim H. Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition. Nanotechnology 19 (2008) 45302
17. Ding D.Y., Chen Z., Rajaputra S., and Singh V. Hydrogen sensors based on aligned carbon nanotubes in an anodic aluminum oxide template with palladium as a top electrode. Sensors and Actuators, B - Chemical 124 (2007) 12-17
18. Gorokh G., Mozalev A., Solovei D., Khatko V., Llobet E., and Correig X. Anodic formation of low-aspect-ratio porous alumina films for metal-oxide sensor application. Electrochimica Acta 52 (2006) 1771-1780
19. Jung H.Y., Jung S.M., Kim J., and Suh J.S. Chemical sensors for sensing gas adsorbed on the inner surface of carbon nanotube channels. Applied Physics Letters 90 (2007) 153114
20. Ling Z.Y., Chen S.S., Wang J.C., and Li Y. Fabrication and properties of anodic alumina humidity sensor with through-hole structure. Chinese Science Bulletin 53 (2008) 183-187
21. Nishide T., and Mizukami F. Crystal-structures and optical-properties of tungsten-oxide films prepared by a complexing-agent-assisted sol-gel process. Thin Solid Films 259 (1995) 212-217
22. 2 sensor. Sensors and Actuators, B - Chemical 94 (2003) 343-351
23. 3 thin film. Sensors and Actuators, B - Chemical 35 (1996) 112-118
24. 2. IEEE Sensors Journal 3 (2003) 171-179
25. 3 metastable nanopowders. Materials and Manufacturing Processes 22 (2007) 773-776
26. 3 hollow-sphere gas sensors. Inorganic Chemistry 43 (2004) 5442-5449
27. 3 nanofibers and their application for ammonia sensing. Journal of Physical Chemistry B 110 (2006) 23777-23782
28. 3 nanostructured films. Synthesis and Reactivity in Inorganic Metal-Organic and Nano-Metal Chemistry 37 (2007) 453-456
29. 3) semiconductor. Sensors and Actuators, B - Chemical 114 (2006) 507-512
30. Solis J.L., Saukko S., Kish L., Granqvist C.G., and Lantto V. Semiconductor gas sensors based on nanostructured tungsten oxide. Thin Solid Films 391 (2001) 255-260
31. Royster T.L., Chatterjee D., Paz-Pujalt G.R., and Marrese C.A. Fabrication and evaluation of thin-film solid-state sensors for hydrogen sulfide detection. Sensors and Actuators, B - Chemical 53 (1998) 155-162
32. 3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique. Sensors and Actuators, B - Chemical 123 (2007) 896-901
33. Nishide T., Yamaguchi H., and Mizukami F. Crystal modulation of tungsten-oxide gels and films prepared by the sol-gel process using 2,4-pentanedione as an organic ligand. Journal of Materials Science 30 (1995) 4946-4949
34. 2 composite nanotubes. Nanotechnology 16 (2005) 1341-1345
35. JCPD card 431035.
36. 3: X (X = Ti, Nb, Ta and Zr) thin films. Solid State Ionics 165 (2003) 117-121
37. Porkodi P., Yegnaraman V., and Jeyakumar D. Polyol mediated synthesis of tungsten trioxide and Ti doped tungsten trioxide-Part 1: Synthesis and characterisation of the precursor material. Materials Research Bulletin 41 (2006) 1476-1486
38. Koltypin Y., Nikitenko S.I., and Gedanken A. The sonochemical preparation of tungsten oxide nanoparticles. Journal of Materials Chemistry 12 (2002) 1107-1110
39. Moulder J.F., Stickle W.F., Sobol P.E., and Bomben K.D. Handbook of X-ray Photoelectron Spectroscopy (1995), Physical Electronics Inc., Eden Prairie
40. Colton R.J., and Rabalais J.W. Electronic-structure of tungsten and some of its borides, carbides, nitrides, and oxides by x-ray electron-spectroscopy. Inorganic Chemistry 15 (1976) 236-238
41. McDonagh C., Bowe P., Mongey K., and MacCraith B.D. Characterisation of porosity and sensor response times of sol-gel-derived thin films for oxygen sensor applications. Journal of Non-Crystalline Solids 306 (2002) 138-148
42. Mills A., and Chang Q. Modelled diffusion-controlled response and recovery behaviour of a naked optical film sensor with a hyberbolic-type response to analyte concentration. Analyst 117 (1992) 1461-1466
43. 3 gas sensors. Advanced Materials 19 (2007) 1641-1645
44. 3 thin film. Sensors and Actuators, B - Chemical 96 (2003) 219-225
45. Mizsei J. How can sensitive and selective semiconductor gas sensors be made?. Sensors and Actuators, B - Chemical 23 (1995) 173-176
46. 3 deposited by modified thermal evaporation for gas-sensing applications. Thin Solid Films 490 (2005) 81-85
47. 2 detection. Sensors and Actuators, B - Chemical 126 (2007) 18-23