메뉴 건너뛰기




Volumn 33, Issue 6, 2010, Pages 799-812

SiGe MEMS technology: A platform technology enabling different demonstrators

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; GERMANIUM COMPOUNDS; MEMS; MIRRORS; OPTICAL COATINGS; SILICON;

EID: 79952653676     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3487610     Document Type: Conference Paper
Times cited : (12)

References (20)
  • 10
    • 79952647169 scopus 로고    scopus 로고
    • US 6,466,358 B2
    • C.E. Tew, US 6,466,358 B2 (2002).
    • (2002)
    • Tew, C.E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.