SiGe based grating light valves: A leap towards monolithic integration of MOEMS

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1195-1197

  Rudra, S ^a   Roels, J ^a   Bryce, G ^b   Haspeslagh, L ^b   Witvrouw, A ^b   Van Thourhout, D ^a  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

Author keywords

Diffractive gratings; Optical MEMS; SiGe

Indexed keywords

ACTUATION VOLTAGES; BACK-END PROCESSING; DIFFRACTIVE GRATING; DISPLAY SYSTEM; ELECTROSTATIC DEFLECTION; GRATING LIGHT VALVE; HYBRID APPROACH; INCIDENT LIGHT; INTEGRATED MEMS; LOW DEPOSITION TEMPERATURE; MICRO BEAMS; MICRO-ELECTRO-MECHANICAL; MONOLITHIC INTEGRATION; OPTICAL EFFICIENCY; OPTICAL MEMS; PACKAGING COSTS; PARASITICS; POLY-SI; POLY-SIGE; REFLECTION GRATINGS;

CHEMICAL VAPOR DEPOSITION; COST REDUCTION; DIFFRACTION GRATINGS; DISPLAY DEVICES; LIGHT; LIGHT REFLECTION; MOEMS; MONOLITHIC INTEGRATED CIRCUITS; POLYSILICON; SILICON ALLOYS; VALVES (MECHANICAL);

MICROELECTROMECHANICAL DEVICES;

EID: 76949084954     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.12.015     Document Type: Article

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