CMOS-integrated poly-sige cantilevers with read/write system for probe storage device

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 2409-2412

  Severi, S ^a   Heck, J ^b   Chou, T K A ^b   Belov, N ^c   Park, J S ^c   Harrar, D ^c   Jain, A ^b   Van Hoof, R ^a   Du Bois, B ^a   De Coster, J ^a   Pedreira, O V ^a   Willegems, M ^a   Vaes, J ^a   Jamieson, G ^a   Haspeslagh, L ^a   Adams, D ^c   Rao, V ^b   Decoutere, S ^a   Witvrouw, A ^a  

^a IMEC   (Belgium)

^b INTEL CORPORATION   (United States)

^c Nanochip Inc   (United States)

Author keywords

CMOS MEMS integration; High capacity memory; Micro cantilever; Poly SiGe; Probe storage; Scanning Probe Microscopy (SPM); Sharp tip fabrication

Indexed keywords

CMOS-MEMS; CMOS-MEMS INTEGRATION; HIGH-CAPACITY MEMORY; MICRO-CANTILEVERS; POLY-SIGE; PROBE STORAGE; SHARP TIP;

ACTUATORS; AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; LITHIUM BATTERIES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; NANOCANTILEVERS; PIEZOELECTRIC TRANSDUCERS; PLASMA ETCHING; PLATINUM; POLYSILICON; PROBES; SEMICONDUCTING GERMANIUM COMPOUNDS; SILICON ALLOYS;

SOLID-STATE SENSORS;

EID: 71449128012     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285430     Document Type: Conference Paper

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