Novel micromirror design with variable pull-in voltage

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1248-1252

  Beernaert, Roel ^a   Podprocky, Tomas ^a   Coster, Jeroen De ^b   Witvrouw, Ann ^b   Haspeslagh, Luc ^b   Avci, Aykut ^a   Smet, Jelle De ^a   Smet, Herbert De ^a,b  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

Author keywords

Micromirror; Multiple electrodes; Pull in voltage; Variable pull in

Indexed keywords

ACTIVE MATRIX DISPLAYS; ACTIVE MATRIXES; BIT PLANES; DUTY CYCLES; ELECTRODE VOLTAGE; GREY LEVELS; MICRO MIRROR; MULTIPLE ELECTRODES; PULL-IN; PULL-IN VOLTAGE; SPEED REQUIREMENT; STRUCTURAL LAYERS; TRIANGULAR WAVEFORM;

COUNTING CIRCUITS; ELECTRODES; IMAGE PROCESSING; PULSE MODULATION; PULSE WIDTH MODULATION; SILICON ALLOYS;

MIRRORS;

EID: 76949091464     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.104     Document Type: Article

References (6)

1. IWT-SBO project 'GEMINI' together with KULeuven and IMEC (Generic Electronics and Microsystems Integration Initiative), IWT-nr 60046, 2007-2011.
2. Van Kessel P.F., Hornbeck L.J., Meier R.E., and Douglass M.R. A MEMS-based projection display. Proc. IEEE 86 8 (1998) 1687-1704
3. Degani O., et al. Journal of micromechanical systems 7 4 (1998)
4. C.E. Tew, Analog Pulse width Modulation Cell for Digital Micromechanical Device, US 6,466,358 B2, 2002.
5. A. Abileah, DICOM Calibration for Medical Displays. , 2005.
6. Markandey V., et al. Video processing for DLP display systems, Proc. SPIE. In: Stevenson R.L., and Ibrahim Sezan M. (Eds). Image and Video Processing IV 2666 (1996) 21-32